946 Controller Instruction Manual
pg. 8
2 Specifications
1
2.1 Controller
Pressure measuring range
2
1 x 10
-11
to 1.0 x 10
+4
Torr
1 x 10
-11
to 1.3 x 10
+4
mbar
1 x 10
-9
to 1.3 x 10
+6
Pa
Relay set point range
3
CC (Cold Cathode)
2.0 x 10
-10
to 5.0 x 10
-3
Torr
2.7 x 10
-10
to 6.5 x 10
-3
mbar
2.7 x 10
-8
to 6.5 x 10
-1
Pa
HC (Hot Cathode)
5.0 x 10
-10
to 5.0 x 10
-3
Torr
6.5 x 10
-10
to 6.5 x 10
-3
mbar
6.5 x 10
-8
to 6.5 x 10
-1
Pa
Pirani
2.0 x 10
-3
to 9.5 x 10
+1
Torr
2.7 x 10
-3
to 1.2 x 10
+2
mbar
2.7 x 10
-1
to 1.2 x 10
+4
Pa
CP (Convection Pirani)
2.0 x 10
-3
to 9.5 x 10
+2
Torr
2.7 x 10
-3
to 1.2 x 10
+3
mbar
2.7 x 10
-1
to 1.2 x 10
+5
Pa
CM (Absolute Manometer)
0.2% to 100% of the measurement range of the head (e.g. 1 Torr
head is 2.0 x 10
-3
to 1.0 x 10
+0
Torr)
FC (Mass Flow Controller)
0.2% to 100% of the measurement range of the MFC (e.g. 1000
SCCM MFC is 2.0 x 10
+0
to 1.0 x 10
+3
SCCM)
Allowed range within which a control sensor may switch on a Cold or Hot Cathode
Pirani
5.0 x 10
-4
to 9.5 x 10
-1
Torr
6.5 x 10
-4
to 1.3 x 10
-1
mbar
6.5 x 10
-2
to 1.3 x 10
1
Pa
CP (Convection Pirani)
2.0 x 10
-3
to 1.0 x 10
-2
Torr
2.7 x 10
-3
to 1.3 x 10
-1
mbar
2.7 x 10
-1
to 1.3 x 10
1
Pa
CM (≤2T head)
1.0 x 10
-1
to 0.2% of FS Torr
1.3 x 10
-1
to 0.2% of FS mbar
1.3 x 10
+1
to 0.2% of FS Pa
Protection set point
4
CC & HC
1.0x10
-5
to 1.0x10
-2
Torr, default setting: 5.0x10
-3
Torr
Operating temperature range
5° to 40°C (41° to 104°F)
1
Specifications subject to change without notice.
2
The measurement range depends upon the sensor options selected.
3
Relay set point values are automatically adjusted when pressure unit is changed.
4
The protection set point is always enabled in 946.