MKS 651D Series, User Manual, Page: 64 / 162

Setup Chapter Four: Local Operation
52
PID Control with Pressure Set Points
To enter the Main Menu to access the set point and gain parameters:
Note
When using PID control, the gains can be adjusted to provide the best
response to the set point.
1. Be sure that the default Pressure and Position display appears on the screen.
2. Press the [ ] key to advance to the first set point menu screen.
The screen displays both the set point and the current system pressure (in the selected
units):
SP A 100 mTorr
PRES 100 mTorr L
Adjust the set point value to the desired pressure. In this example, set point A is a
pressure value of 100 mTorr, and the system pressure is 100 mTorr.
3. Press the [ ] key to advance to the next screen.
The screen displays:
GAIN A 1.000
PRES 1.64 Torr L
The screen displays the value for the gain (Gain A) and the current system pressure.
Adjust the gain to any value from 0 to 100%.
4. Press the [ ] key to advance to the next screen.
The screen displays:
PHASE A 0.0%
PRES 100.00 mTorr L
The screen displays the phase value and the current system pressure. Adjust the phase
to any value from 0 to 100%.
5.* Press the [ ] key to advance to the next screen.