MKS 651D Series, User Manual, Page: 108 / 162

Setup Messages Chapter Five: Remote RS-232 Operation
96
How To Set the Process Limit Relays
The command [ P x value ] sets the process limit relay thresholds, where:
x: 1 = Low threshold - Process Limit 1
2 = High threshold - Process Limit 1
3 = Low threshold - Process Limit 2
4 = High threshold - Process Limit 2
value: Pressure limit
To report a process limit threshold, issue the request:
R xx
where xx : 11 = Low threshold - Process Limit 1
12 = High threshold - Process Limit 1
13 = Low threshold - Process Limit 2
14 = High threshold - Process Limit 2
The controller responds with the message [
P x value
], where:
x :
1 = Low threshold - Process Limit 1
2 = High threshold - Process Limit 1
3 = Low threshold - Process Limit 2
4 = High threshold - Process Limit 2
value : Pressure limit
To report the low threshold for process limit 1, enter:
R 10
An example response, if the low threshold for process limit 1 is 100 Torr, is:
P 1 100
Note
To disable a low threshold process limit, set the P x value to negative full
scale.
To disable a high threshold process limit, set the P x value to full scale.