MKS 651D Series, User Manual, Page: 144 / 162

Appendix A: Product Specifications
132
External Set Point Signal 5 Volts or 10 Volts * , selectable
Fuses
Low power unit: 90 to 132 VAC
180 to 264 VAC
High power unit: 90 to 132 VAC
180 to 264 VAC
0.63A (T), 250V, 5 x 20 mm
0.315A (T), 250V, 5 x 20 mm
1.25A (T), 250V, 5 x 20 mm
0.63A (T), 250V, 5 x 20 mm
Maximum relative humidity
80% for temperatures up to 31
°
C,
decreasing linearly to 50% at 40
°
C
Input Power
Low power unit
High power unit
90 to 132 or 180 to 264 VAC @50/60 Hz
75 VA (max)
90 to 132 or 180 to 264 VAC @48/62 Hz
150 VA (max)
Output Power
Low power unit
High power unit
±15 VDC @ 0.5 Amps (max)
4
±15 VDC @ 1.5 Amps (max)
Overrange Pressure ±10.5 Volts
Pressure Input Signal 0 to +10 Volts DC
Pressure Units Torr, mTorr, mBar, µBar, Pascal, kPa,
cmH
2
0, inH
2
0
Set Points
Internal
External 5, each one pressure or position selectable
1, pressure or position selectable
Weight
Low power unit
High power unit
Optional valve failsafe battery backup
7 lbs. 3 oz. (3.26 kg)
6 lbs. (2.04 kg)
3 lbs. 8 oz. (1.25 kg)
Due to continuing research and development activities, these product specifications are subject to change without notice.
4
Derated to 0.4 Amps with 90 to 99 or 180 to 198 VAC input.