MKS MultiGas High-Speed Gas Sampling Cart
Changing valve plates
1.
Remove the valve plates (
4
) and O-rings (
5
) from intermediate plate (
6
).
2.
Check that the intermediate plate (
6
) and head plate (
3
) are clean. Clean the parts if necessary.
Make sure that the sealing edges of the head plate (
3
) and intermediate plate (
6
) are
undamaged.
3.
Contact pump manufacturer or MKS in case of roughness, scratches and corrosion.
Order and replace damaged parts.
4.
Insert valve plates:
Upper and lower side of the valve plates are identical. The position of the valve plates is
determined by the shape of the valve seats.
Lay new valve plates (
4
) in the valve seats of the intermediate plate (
6
).
5.
Fit the new O-rings (
5
) in the intermediate plate.
6.
Dispose of the old diaphragm, valve plates and O-rings properly.
Mounting pump head
1.
Place the intermediate plate (
6
) on the carrier (
12
) in the position indicated by the felt tip pen
mark.
2.
Place head plate (
3
) together with pump-head insulation and threaded adapters on intermediate
plate (
6
) (felt pen marking in direction of motor).
3.
Place disk springs (
2
) (for position and orientation see figure below:
4.
Insert head screws (
1
) with disk springs (
2
) and tighten diagonally (tightening torque: 9 Nm).
5.
Perform a leak test in order to ensure the required gas tightness of the pump head after
maintenance.
6.
Refit head insulation.
Installation and Use Manual 2011 APRIL 2 Rev. 1.5
43
