8
GA130001441_002_C0
– 09/2016
1.
Description
1.1
Validity
1.1.1
Part Number
This document applies to the following products:
Part Number
Product
Version
Serial
Number
230110
COMBIVAC CM 51
Three-channel measuring instrument for passive vacuum sensors
1.0
et seq.
1000
et seq.
230111
COMBIVAC CM 51
Three-channel measuring instrument for passive vacuum sensors
with Profibus DP
1.0
et seq.
1000
et seq.
Table 1
–
Part Numbers
1.1.2
Nameplate
A nameplate is located on the bottom side of the instrument. When communicating with
Leybold Vacuum GmbH, stating the information on the nameplate is necessary. For this
reason please enter the following information:
Figure 1
– Nameplate (Examble)
1.2
Conforming Utilisation
The COMBIVAC CM 51 is a universal vacuum gauge which owing to the combination of two
principles of measurement - Pirani (Thermovac) and Penning (cold cathode) - permits
measurements and checks within the entire vacuum pressure range between1·10-9 mbar
and atmospheric pressure.
One PENNINGVAC sensor and at most two THERMOVAC sensors can be connected.
The built-in RS232/RS485 as well as Profibus-DP interfaces permit computer-controlled
operation as well as the exchange of the measurement data between the COMBIVAC CM
51 and a computer.
Operate all connected sensors in agreement with the information given in the corresponding
Operating Instructions.
NOTICE:
Based on the technical data please check first whether your measuring
instrument is suited to your kind of application.
