7
11.3
Cleaning the Microscope Surface ...................................................................116
11.4
Maintaining the Scanner Cooling System .......................................................116
12.
Transport and Disposal...................................................................................117
12.1
Changing the Installation Location..................................................................117
12.2
Disposal ..........................................................................................................117
13.
Contact .............................................................................................................117
14.
Glossary ...........................................................................................................118
15.
Appendix ..........................................................................................................124
15.1
Safety Data Sheets from Third-party Manufacturers.......................................124
15.2
Declaration of conformity ................................................................................129
15.3
People´s Republic of China ............................................................................130