Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
21
SECTION 2 - INSTALLATION
2.1 FACILITY REQUIREMENTS
2.1.1 FACILITIES
The spin processor should be installed on a vibration free surface in a clean,
temperature and humidity controlled environment to provide the best conditions
for repeatable processing results.
Seal Purge - N
2
or CDA (Clean Dry Air) 60 - 70 psi (4.1 – 4.8 bar). N
2
or CDA
must be moisture free. If moisture is present install an air dryer type filter. For
particulate control it is recommended that a point of use filter, 1 micron, or less,
be installed after the regulator and before the processor. The seal purge tubing
MUST NOT BE “T”
to supply another output from the same regulator.
Vacuum - 20 – 28” Hg with a flow volume of 1.6 - 4.5 SCFM @ 0” Hg. Other
conversions see below.
20”Hg -
28”Hg or,
1.6 -
4.5scfm or,
0.68bar 0.95bar
or,
0.047cm/m 0.11cm/m
or,
68kpa
95kpa
or,
47Lpm 127Lpm
508torr 711torr
Exhaust see section 2.1.8 below
Drain – Open to atmosphere – NOT restricted by a vapor trap (see Figure 2-2C)
2.1.2 POWER REQUIREMENTS
Power – 95 to 240VAC, 47/63HZ, 3 amps, 300 watts. A 15 foot (~200cm) power
cord with a 3 pronged plug is supplied with an appropriate country plug adapter if
necessary. All of our present designs have universal voltage input capability.
2.1.3 MAIN CIRCUIT BREAKER
The circuit breaker on the spin processor is rated for 200A-interrupt current
capacity. SEMI S2 requires a minimum of 10,000 AIC for the main disconnect.
The end-user of the spin processor system should install a suitably rated circuit
breaker (minimum 10,000 AIC) for the circuit if they wish to meet SEMI S2
requirements
2.1.4 DIMENSIONS
See Appendix for Basic System Dimensions and Installation Diagrams.
Additional space will be required for pressure vessels and pneumatic fluid/N
2
control valves.
2.1.5 AMBIENT TEMPERATURE
The Spin processor is designed to run in an ambient temperature of between 68 -
75
F (20 -24
C).