MJ400215A1
1
Table of Contents
Page
1
．
Foreword
・・・・・・・・・・・・・・・・・・・・・・・・・・・
2
2
．
Switching to “control by digital communications”
・・・・・・・・・・・
2
3
．
Basic Specifications
・・・・・・・・・・・・・・・・・・・・・・・
4
4
．
Message Structure
・・・・・・・・・・・・・・・・・・・・・・・
5
5
．
Details of Commands
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7
1) RCFS
：
Acquisition of the full scale flow rate [significand]
・・・・・・・
7
2) RDPP
：
Acquisition of the flow rate decimal point position
[number of decimal places]
・・・・・・・・・
7
3) RFRU
：
Acquisition of the flow rate unit
・・・・・・・・・・・・・・・
7
4) RFRC
：
Acquisition of the flow rate reference temperature condition
・・
8
5) WFRC
：
Setting of the flow rate reference temperature condition
・・・・
8
6) RCFR
：
Acquisition of the instantaneous flow rate [significand]
・・・・・
8
7) RPGT
：
Acquisition of the calibration gas type
・・・・・・・・・・・・
8
8) RCGT
：
Acquisition of the gas type
・・・・・・・・・・・・・・・・・
9
9) RCFM
：
Acquisition of the CF value in the user custom CF mode
・・・・
9
10) WCFM
：
Setting of the CF value in the user custom CF mode
・・・・・
9
11) RLFD
：
Acquisition of the display cut setting (0 shown if within ±1%F.S.)
・
10
12) WLFD
：
Setting of the display cut setting (0 shown if within ±1%F.S.)
・・
10
13) RALM
：
Acquisition of the alarm occurrence status
・・・・・・・・・・
10
14) ZERO
：
Execution of sensor zero adjustment
・・・・・・・・・・・・
10
- - - - - -The following are commands used by the mass flow controller only - - - - - - -
15) RCVS
：
Acquisition of the valve status
・・・・・・・・・・・・・・・
11
16) RCVO
：
Acquisition of the valve opening
・・・・・・・・・・・・・・
11
17) RSFR
：
Acquisition of the set flow rate [significand]
・・・・・・・・・・
11
18) RRDP
：
Acquisition of the motion differential pressure
・・・・・・・・
11
19) WRDP
：
Setting of the motion differential pressure
・・・・
・・・・・・
12
20) RFSM
：
Acquisition of the flow rate setting method
・・・・・・・・・・
12
21) WFSM
：
Setting of the flow rate setting method
・・・・・・・・・・・・
12
22) RVSS
：
Acquisition of the valve status (digital)
・・・・・・・・・・・・
12
23) WVSS
：
Setting of the valve status (digital)
・・・・・・・・・・・・・・
12
24) RSFD
：
Acquisition of the set flow rate [significand] (digital)
・・・・・・
13
25) WSFD
：
Setting of the set flow rate [significand] (digital)
・・・・・・・・
13
26) RALA
：
Acquisition of the response to alarm occurrence
・・・・・・・・
13
27) WALA
：
Setting of the response to alarm occurrence
・・・・・・・・・
13
28) RAZS
：
Acquisition of the auto zero
・・・・・・・・・・・・・・・・
14
29) WAZS
：
Setting of the auto zero
・・・・・・・・・・・・・・・・・・
14
6
．
Flow Rate Expression
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15
