MJ400215A1
11
The following are commands used by the mass flow controller only.
15) RCVS
：
Acquisition of the valve status
The present valve status is acquired regardless of analog input or digital setting.
Data Command: None
Response: Decimal 1 digit (fixed length 1 byte)
0
：
Fully open, 1
：
Control, 2
：
Fully close
16) RCVO
：
Acquisition of the valve opening
The present valve opening is acquired.
Data Command: None
Response: Decimal 4 digits (fixed length 4 bytes)
Range:
0000
－
1000 (in units of 0.1%)
17) RSFR
：
Acquisition of the set flow rate [significand]
The set flow rate [significand] is acquired.
This is used to calculate the set flow rate together with the flow rate decimal
point position [number of decimal places] and flow rate unit.
The currently set flow rate is acquired regardless of the setting of the flow rate
setting method.
Data Command: Decimal 4 digits (fixed length 4 bytes)
Range: 0000
－
9999
Response: None
18) RRDP
：
Acquisition of the motion differential pressure
The motion differential pressure is acquired.
Data Command: None
Response: Decimal 1 digit (fixed length 1 byte)
0
：
Standard differential pressure, 1
：
Low differential pressure
