49
SFA
- Set Flow All ON/OFF
Return Value : OK or ?!
Parameter : 8byte String '00000000' ~ '11111111'
Parameter means that 0: Off, 1:On
LSB
10100011
MSB
EX)
Ch1, Ch2, Ch5, Ch7 is Flow ON, Other Ch is Flow OFF
<Host> 'SFA 11001010<CR>'
<IMC1300> 'OK<CR>'
SZ1 ~ SZ8
- Set Zero
Return Value : OK or ?!
EX)
<Host> 'SZ1<CR>'
<IMC1300> 'OK<CR>' or 'FL<CR>'
'OK' means zero success. 'FL' means zero failed.
SU1 ~ SU8
- Set Unit
Return Value : OK or ?!
Parameter : 1 or 2
Parameter means 1 : SCCM or Torr 2:SLM or mTorr
If MFC Card is installed Unit is SCCM or SLM but CM is Torr or
mTorr
EX)
<Host> 'SU1 1<CR>'
<IMC1300> 'OK<CR>'
Summary of Contents for IMC1300
Page 2: ...2 WARRANTY Flow Pressure Controller IMC1300 1 Interface Demo Program Internet Home Page...
Page 5: ...5 CUSTMMER SUPPORT IMC1300 Flow Pressure Controller...
Page 12: ...12 Control Applications Figure 3 Upstream Pressure Control...
Page 28: ...28 6 LCD Brightness 1 key 2 LCD Brightness DN KEY1 UP KEY2 ESC Cancel ENT Save...
Page 31: ...31 2 key 1 0000 0000 cc 2 0000 0000 cc 3 0000 0000 cc 4 0000 0000 cc...