
47
RU1 ~ RU8
- Read Unit
- Return Value : 6byte data
EX)
<Host> 'RU1<CR>'
<IMC1300> ' SCCM<CR>' or ' SLM<CR>' or ' Torr<CR>' or
'mTorr<CR>'
RMS
- Read MFC Status
- Return Value : 9byte data
EX)
<Host> 'RMS<CR>'
<IMC1300> '11001011<CR>'
Return Value means that LSB11001011MSB is MFC Flow ON/OFF
Status.
Each bit means each Channel. MSB is 8Ch and LSB is 1Ch.
1 means MFC Flow ON and 0 mean MFC Flow OFF.
String '11001011' means that Ch1, Ch2, Ch5, Ch7, Ch8 is ON
other Channels OFF.
RD1 ~ RD8
- Read Device
- Return Value : 4byte data
EX)
<Host> 'RD1<CR>'
<IMC1300> 'MFC<CR>' or ' CM<CR>'
Install Card Data.
Summary of Contents for IMC1300
Page 2: ...2 WARRANTY Flow Pressure Controller IMC1300 1 Interface Demo Program Internet Home Page...
Page 5: ...5 CUSTMMER SUPPORT IMC1300 Flow Pressure Controller...
Page 12: ...12 Control Applications Figure 3 Upstream Pressure Control...
Page 28: ...28 6 LCD Brightness 1 key 2 LCD Brightness DN KEY1 UP KEY2 ESC Cancel ENT Save...
Page 31: ...31 2 key 1 0000 0000 cc 2 0000 0000 cc 3 0000 0000 cc 4 0000 0000 cc...