Inficon 3PE5-001-B7HZ Operating Manual Download

Page: 77 / 80

tinb60e1 (2020-07)

Spare Parts

When ordering spare parts, always indicate

•

all information on the product nameplate

•

description and ordering number according to the spare parts

list

Gold Plated Tungsten Sensor

Ordering no.

PGE500 Spare Sensor KF 16, W

352-550

PGE500 Spare Sensor KF 25, W

352-551

PGE500 Spare Sensor KF 40, W

352-552

PGE500 Spare Sensor 16 CFR, W

352-553

PGE500 Spare Sensor 40 CFR, W

352-554

PGE500 Spare Sensor 4 VCR, W

352-555

PGE500 Spare Sensor 8 VCR, W

352-556

PGE500 Spare Sensor

⅛

"NPT, W

352-557

Platinum Sensor

Ordering no.

PGE500 Spare Sensor KF 16, Pt

352-560

PGE500 Spare Sensor KF 25, Pt

352-561

PGE500 Spare Sensor KF 40, Pt

352-562

PGE500 Spare Sensor 16 CFR, Pt

352-563

PGE500 Spare Sensor 40 CFR, Pt

352-564

PGE500 Spare Sensor 4 VCR, Pt

352-565

PGE500 Spare Sensor 8 VCR, Pt

352-566

PGE500 Spare Sensor

⅛

"NPT, Pt

352-567

Summary of Contents for 3PE5-001-B7HZ

Page 1: ...tinb60e1 2020 07 1 Pirani Gauge Enhanced PGE500 With DeviceNet Operating Manual Incl EU Declaration of Conformity...

Page 2: ...1 2020 07 Product Identification In all communications with INFICON please specify the infor mation given on the product nameplate For convenient refer ence copy that information into the space provid...

Page 3: ...Manual is applicable to the INFICON model PGE500 product with Device Net interface manufactured with firmware number FW 2998 101 and higher last three digits of 101 or higher See STATUS menu described...

Page 4: ...iable for indirect or consequential damages that result from the use or application of this equipment Any examples or diagrams included in this manual are provided solely for illustrative purposes Bec...

Page 5: ...ifies information about practices or circumstances that can cause electrical or physical hazards which if precautions are not taken could result in minor or moderate injury property damage or economic...

Page 6: ...nated Adhere to the relevant regulations and take the necessary precautions when handling contamin ated parts Communicate the safety instructions to all other users Liability and Warranty INFICON assu...

Page 7: ...2 3 2 Electrical Interface and Control 16 2 4 Overpressure and use with hazardous gases 17 2 5 Gases other than Nitrogen air 18 3 Installation 18 3 1 Mechanical Installation 18 3 2 Electrical Install...

Page 8: ...9 DeviceNet Protocol for PGE500 52 7 9 1 Standard Objects 54 7 9 1 1 Identity Object 54 7 9 1 2 DeviceNet Object 55 7 9 1 3 Connection Object Explicit Message Connection 56 7 9 1 4 Connection Object P...

Page 9: ...t are generated above 1 Torr convection enhanced Pirani gauges increase the measuring range to just above atmosphere The INFICON PGE500 module provides the basic signal condi tioning required to turn...

Page 10: ...tific notation 3 digits plus 2 digit exponent for user se lectable units in Torr mbar or Pa Engineering notation is also user selectable for Torr mTorr only Materials exposed to vacuum gold plated tun...

Page 11: ...evice Adjustable parameters setpoints engineering units of measure vacuum and atmos phere calibration Messaging polled I O and explicit Baud rates 125K 250K or 500K adjust able via rotary switch Suppl...

Page 12: ...1 3 Dimensions Fitting Dimension A mm inch DN 16 ISO KF 29 5 1 16 DN 25 ISO KF 29 5 1 16 DN 40 ISO KF 29 5 1 16 DN 16 CF R 34 1 34 DN 40 CF R 34 1 34 4 VCR female 43 7 1 72 8 VCR female 40 9 1 61 1 8...

Page 13: ...ds of installation and intended use of this instrument INFICON disclaims all liability for the customer s failure to comply with these instructions Although every attempt has been made to consider mos...

Page 14: ...nty To reduce the risk of fire or electric shock do not expose this product to rain or moisture These products are not waterproof and careful attention must be paid to not spill any type of liquid ont...

Page 15: ...on and instructions for returning the product to INFICON for evaluation 2 3 Electrical Conditions WARNING When high voltage is present in any vacuum system a life threatening electrical shock hazard m...

Page 16: ...a ground lug on the PGE500 gauge vacuum connection flange if necessary WARNING In order to protect personnel from electric shock and bodily harm shield all conductors which are subject to potential h...

Page 17: ...ll an isolation valve or pres sure relief device to protect the gauge tube from overpressure conditions With some fittings actual safe overpressure condi tions may be lower for example a quick connect...

Page 18: ...device in an explosive atmos phere or in the presence of flammable gases vapors or fumes Do not use this device to measure the pressure of explosive or combustible gases or gas mixtures The sensor wi...

Page 19: ...g or cooling such as heaters or air conditioning vents Mount the PGE500 with its main long axis horizontal see dia gram below Pressure reading errors may occur above 1 Torr if the unit is not mounted...

Page 20: ...icles or condensation from collecting in the gauge Do not mount the PGE500 where it will be subjected to exces sive vibration Vibrations may cause unstable readings measu rement errors and possible me...

Page 21: ...of your vacuum system are properly grounded for safety as well as intended operation of the equipment When using KF flanges metal clamps must be used to ensure proper grounding Be aware that some vac...

Page 22: ...or disconnecting it 9 pin D sub Connector pinout Pin no Pin description 1 Relay 2 Normally Open 2 Relay 2 Common 3 Relay 2 Normally Closed 4 No Connection 5 Relay 1 Common 6 Relay 1 Normally Closed 7...

Page 23: ...ge values Press the ENTER key to access the parameters and save the new set tings Press the MENU Key to return to the previous menu or press repeatedly to return to the main pressure measurement displ...

Page 24: ...ents the DeviceNet network status The LED indica tor marked MOD represents the gauge module PGE500 status MOD Status LED LED Meaning off no power to the gauge red an error condition fault exits with t...

Page 25: ...ction s in the timed out state flashing green gauge is on the network has completed the dup licate MAC ID check but connection to other nodes does not exist gauge is on the network but connection to t...

Page 26: ...MAC ID to identify the specific PGE500 on the network The address can range from 0 to 63 The Switch marked MSD represents the most significant digit of the ad dress first digit and it can be set to an...

Page 27: ...ientation is different than the orientation used at the factory As such it is very important to perform your own initial setup and calibration by setting zero and atmosphere with the gauge installed i...

Page 28: ...s normally required only once during the initial setup and maybe checked by the user periodically After power has been applied to the gauge during the initial setup allow five minutes for the gauge to...

Page 29: ...DFAULTS DEFAULTS Factory default NO Gauge shipped with factory defaults but user must select YES to set factory defaults again RELAYS RELAY 1 RLY Factory default DISABLED LO TRIP Factory default 7 00...

Page 30: ...TUS DFAULTS CALIBRATION RELAYS top level menus Press the MENU key to return to the previous menu or press repeatedly to return to the main pressure display screen To continue setting additional parame...

Page 31: ...hen switch to a back lit background color for the next 12 hours If you like to have the 12 hour period for the normal display mode to start at a specific time of the day simply access the SCRN SVR men...

Page 32: ...sion of device 4 6 3 DEFAULTS The following menu allows the user to return all values to the original factory default setting DEFAULTS Factory default NO Gauge shipped with factory defaults but user m...

Page 33: ...ocal uncorrected barometric pressure air is known simply vent your vacuum system chamber to expose the gauge to the local atmos pheric pressure 2 If you are at sea level you may simply select SET TO 7...

Page 34: ...esponds with message VAC SET confirming zero has been successfully set Press the menu key to return to the previous menu s If for a specific reason you want to set the zero pressure reading to a numbe...

Page 35: ...played but cannot be changed while in this menu selection HI TRIP Factory default 7 50 E 02 TORR This setpoint corresponds to the turn off point for Relay 1 Relay 1 will turn off when the pressure ris...

Page 36: ...larity is as desired Select the TEST RELAYS menu and the following two submenus will appear Factory default OFF Press the ENTER key to turn on and energize relay 1 Press the ENTER key again to turn of...

Page 37: ...other than N2 air For N2 the calibration shows excellent agreement between in dicated and true pressure throughout the range from 10 4 to 1000 Torr At pressures below 1 Torr the calibration curves fo...

Page 38: ...nductivity gauges like the INFICON convection gauges are not recommended for use with flammable or explosive gases Moisture water vapor In some processes lyophilization for example the gas composi tio...

Page 39: ...hat the difference in the response for both of these types of gauges is virtually indistinguishable CAUTION Do not assume this data applies to other convection gauges which may or may not be the same...

Page 40: ...gas conversion data and other proper precautions could result in injury to per sonnel and or damage to equipment Suggested precautions when using gases other than nitrogen N2 Install a pressure relie...

Page 41: ...1 2 75E 01 KR 1 00E 04 2 00E 04 5 00E 04 4 00E 04 1 00E 03 2 30E 03 4 80E 03 9 50E 03 2 35E 02 4 68E 02 9 11E 02 CO 2 1 00E 04 2 00E 04 5 00E 04 1 10E 03 2 30E 03 5 00E 03 1 10E 02 2 22E 02 5 49E 02 1...

Page 42: ...3 79E 00 4 68E 00 5 99E 00 6 89E 00 KR 2 17E 01 4 00E 01 7 00E 01 1 28E 00 1 78E 00 2 29E 00 2 57E 00 2 74E 00 3 32E 00 3 59E 00 CO 2 4 89E 01 9 50E 01 1 71E 00 3 34E 00 4 97E 00 6 59E 00 8 22E 00 9 2...

Page 43: ...9 95E 00 1 05E 01 1 11E 01 KR 3 94E 00 4 21E 00 4 44E 00 4 65E 00 4 75E 00 4 84E 00 4 99E 00 5 08E 00 CO 2 2 24E 01 2 87E 01 3 64E 01 4 61E 01 5 39E 01 5 94E 01 7 95E 01 1 11E 02 O 2 4 85E 02 6 04E 0...

Page 44: ...gen is 1 00E 01 Torr 2 Using argon Ar pressure display shows 8 83E 0 Torr True pressure of argon is 1 00E 02 Torr 3 Using oxygen O2 pressure display shows 4 86E 01 mTorr True pressure of oxygen is 5 0...

Page 45: ...1 3 60E 01 KR 1 00E 04 3 00E 04 4 00E 04 5 00E 04 1 30E 03 3 10E 03 6 40E 03 1 26E 02 3 13E 02 6 23E 02 1 20E 01 CO 2 1 00E 04 3 00E 04 6 00E 04 5 00E 04 3 10E 03 5 90E 03 1 46E 02 2 95E 02 7 31E 02 1...

Page 46: ...5 05E 00 6 23E 00 7 98E 00 9 18E 00 KR 2 80E 01 5 30E 01 9 30E 01 1 70E 00 2 37E 00 3 05E 00 3 42E 00 3 65E 00 4 42E 00 4 78E 00 CO 2 6 50E 01 1 26E 00 2 27E 00 4 45E 00 6 62E 00 8 78E 01 1 09E 01 1 2...

Page 47: ...8E 01 1 25E 01 1 30E 01 1 32E 01 1 39E 01 1 47E 01 KR 5 25E 00 5 61E 00 5 91E 00 6 19E 00 6 33E 00 6 45E 00 6 65E 00 6 77E 00 CO 2 2 98E 01 3 82E 01 4 85E 01 6 14E 01 7 18E 01 7 91E 01 1 05E 02 1 47E...

Page 48: ...measurement of 1 17E 01 mBAR True pressure of argon is 1 33E 02 mBAR 3 Using oxygen O2 pressure display shows pressure measurement of 1 29E 02 mBAR True pressure of O2 is 1 33E 02 mBAR 7 DeviceNet Ope...

Page 49: ...et Objects The PGE500 supports the Discrete Output Object Class 9 get attribute 3 Value only Two instances are supported indicating the state of the Trip Points 7 4 Configuring the DeviceNet switches...

Page 50: ...Service 4B hex DeviceNet Class 3 Instance 1 Allocation data Bit1 Polled bit0 Explicit 3 Master ID 0 7 6 Configuring Expected Packet Rate The default Expected Packet Rate is 2 5 seconds If message rat...

Page 51: ...status byte indi cates Warning in bit 5 reading lower than zero vacuum calibra tion needed and Alarm in bit 1 sensor failure Default configu ration is 1 byte status and 4 bytes floating point pressure...

Page 52: ...1935 300 7311 0 5 2306 400 7473 0 65 2573 500 7622 0 85 2888 600 7747 1 3086 700 7851 2 4007 760 7909 3 4552 900 8019 5 5204 1000 8086 7 9 DeviceNet Protocol for PGE500 The INFICON PGE500 module is ba...

Page 53: ...s on the network recognize the PGE500 s unique address they use the data Instance Master Data Device Data Data Type Description Type 1 default None 00 00 UINT UINT vacuum pressure Open 2 None 00 00 00...

Page 54: ...ta Type De scription Type 0Ehex 1 1 1 None 633 UINT Vendor Identification Open 0Ehex 1 1 2 None 28 UINT Product Type Open 0Ehex 1 1 3 None 100 UINT Product ID Open 0Ehex 1 1 4 None 1 01 STRUCT Firmwar...

Page 55: ...ocation choice range 0 3 Get master ID range 0 63 Open 0Ehex 3 1 6 None 0 BOOL The Node Address Switch es have changed since last power up reset Open 0Ehex 3 1 7 None 0 BOOL The Baud Rate Switch es ha...

Page 56: ...et transport class trigger Open 0Ehex 5 1 4 None FB 05 UINT Get produced connection ID Open 0Ehex 5 1 5 None FC 05 UINT Get consumed connection ID Open 0Ehex 5 1 6 None 21hex BYTE Get initial communic...

Page 57: ...I O Open 0Ehex 5 2 3 None 82hex BYTE Get transport class trigger Open 0Ehex 5 2 4 None FF 03 UINT Get produced connection ID Open 0Ehex 5 2 5 None FD 05 UINT Get consumed connection ID Open 0Ehex 5 2...

Page 58: ...connection path Open 10hex 5 2 10hex 00 Success EPATH Set consumed connection path Open Connection Object Polled I O Connection 7 9 1 5 Discrete Output Point Object There are two instances of the Disc...

Page 59: ...RING Manufacturer s Name Open 0Ehex 30hex 1 6 None PGE500 SHORT STRING Manufacturer s Model Number Open 0Ehex 30hex 1 7 None V1 01 SHORT STRING Software Revision Level Open 0Ehex 30hex 1 8 None 100 SH...

Page 60: ...Ehex 31hex 1 6 None 44 42 7C F9 REAL Pressure Value Open 0Ehex 31hex 1 7 None 00 BYTE Status Alarm and Warning State Open 0Ehex 31hex 1 0Bhex None CAhex USINT Offset A Data Type Open 0Ehex 31hex 1 0Ch...

Page 61: ...profile will show a relationship between these two objects where an S Gas Calibration Object is used Service Class Instance Attribute Master Data Device Data Data Type Descript ion Type 0Ehex 34hex 1...

Page 62: ...00 Success BOOL Low Trip Enable Open 0Ehex 35hex 1 or 2 7 None 00 BOOL Output Status Open 0Ehex 35hex 1 or 2 8 None 01 BOOL Polarity of Output as derived to Status Open 0Ehex 35hex 1 or 2 9 None 01 BO...

Page 63: ...um operating pressure is higher than 1 00 10 3 Torr it is not normally necessary to perform cali bration at zero and thus span calibration should be adequate If you are able to evacuate your system to...

Page 64: ...ossible cleaning Ensure gauge is not mounted where excessive vibration is present Return to factory for possible cleaning Replace sensor inside PGE500 module continued Possible Cause No power The proc...

Page 65: ...sensor inside PGE500 module Return to factory for possible cleaning Possible Cause Incorrect setup Sensor wire damaged System pressure over 1000 Torr Faulty electronics Contamination Sensor wire damag...

Page 66: ...this failure mode is possible In this case cleaning can t solve the problem because the sensor has been destroyed The sensor or module must be replaced If you experience this failure mode quickly or f...

Page 67: ...ping on the gauge between process cycles A dry N2 purge will help speed up drying or the gauge may be gently heated provided temperature doesn t exceed the specified limit of 40 C operating Coatings S...

Page 68: ...terials that may be transported via line of sight momentum from entering your vacuum gauge or other components it is advisable to install some form of apparatus that will block the line of sight In ma...

Page 69: ...tinb60e1 2020 07 69 Remove all 8 Torx screws from both side panels of the enclosure Remove the back panel by lifting it off from the enclosure...

Page 70: ...panel that covers the three mechanical switches Note how far the pins protrude through the bridge PCB by measuring dimension A show below This dimension will be used for proper reinstallation of the...

Page 71: ...tinb60e1 2020 07 71 Remove the bridge PCB from the assembly Remove the sensor from the assembly by pulling it up and out of the enclosure assembly...

Page 72: ...20 07 Push pins of new sensor through the holes in the Bridge PCB Set Dimension A as previously measured in step 4 GENTLY lift the CPU PCB and install the bridge PCB sen sor assembly into the CPU PCB...

Page 73: ...tinb60e1 2020 07 73 After reinstalling the bridge PCB sensor into the CPU PCB reinstall the side panel Reinstall the back panel...

Page 74: ...m and zero again 9 Factory Service and Support If you need help setting up operating troubleshooting or obtaining a return materials authorization number RMA number to return the module for diagnosis...

Page 75: ...a duly completed declaration of contamination Form under www inficon com Products that are not clearly declared as free of harmful sub stances are decontaminated at the expense of the customer Produc...

Page 76: ...pose of such substances in accordance with the relevant local regulations Separating the components After disassembling the product separate its components ac cording to the following criteria Non ele...

Page 77: ...40 W 352 552 PGE500 Spare Sensor 16 CFR W 352 553 PGE500 Spare Sensor 40 CFR W 352 554 PGE500 Spare Sensor 4 VCR W 352 555 PGE500 Spare Sensor 8 VCR W 352 556 PGE500 Spare Sensor NPT W 352 557 Platin...

Page 78: ...nic equipment Pirani Gauge Enhanced PGE500 Standards Harmonized and international national standards and specifi cations EN 61000 6 2 2005 EMC generic immunity standard EN 61000 6 4 2007 A1 2011 EMC g...

Page 79: ...tinb60e1 2020 07 79 Notes...

Page 80: ...LI 9496 Balzers Liechtenstein Tel 423 388 3111 Fax 423 388 3700 reachus inficon com www inficon com Original English...

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