Inficon 3PE5-001-B7HZ, Operating Manual, Page: 17 / 80

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2.4 Overpressure and use with hazardous gases
WARNING! Install suitable protective devices that will
limit the level of pressure inside your vacuum chamber to less
than what the vacuum chamber system components are capable
of withstanding. INFICON gauges should not be used at pres-
sures exceeding 1000 Torr absolute pressure.
In cases where an equipment failure could cause a hazardous
condition, always implement fail-safe system operation. For ex-
ample, use a pressure relief device in an automatic backfill op-
eration where a malfunction could result in high internal pres-
sures if the pressure relief device was not installed on the
chamber.
The PGE500 vacuum gauge module is not intended for use at
pressures above 20 psia (1000 Torr); DO NOT exceed 35 psig
(<2½ bars) pressure inside the sensor. If your chamber goes to
higher pressures, you should install an isolation valve or pres-
sure relief device to protect the gauge tube from overpressure
conditions. With some fittings, actual safe overpressure condi-
tions may be lower; for example, a quick-connect, O-ring com-
pression fitting may forcibly release the gauge tube from the
vacuum chamber fitting with only a few psi over local uncor-
rected barometric (atmospheric) pressure.
CAUTION! If the internal pressure of a vacuum gauge
device is allowed to increase above local uncorrected baro-
metric pressure (atmospheric pressure side), vacuum fit-
tings may release and possible overpressure conditions
may cause leaks that would allow the gas inside the gauge
tube to release into the atmosphere of the surrounding en-
vironment. Toxic, pyrophoric and flammable gases are ex-
amples of hazardous gases that if allowed to leak out of the
vacuum/pressure containment vessel into the atmospheric
environment, could cause bodily injury and possible dam-
age to equipment. Never expose the gauge tube internal
volume to pressure above local atmospheric pressure when
using hazardous gases.