9600 Compressor Schematics (Low Voltage - Three Phase Cryopump Power)
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©2004 Helix Technology Corporation
Pub. No. 8040426, Rev. 101, 2/10/04
ECO No. 16163
1-3
Table 1-3: Legend: On-Board Output Module P/N 8135148G001
Identifier
Description
J30
On-Board Output Receptacle
J31
Remote Control Receptacle
P18
Power Connector
P19
Signal Connector
P31
Remote Jumper
Table 1-4: Legend: Cryo-Torr Interface P/N 8135904P001
Identifier
Description
J27
Coldhead 1 Output Receptacle
J28
Coldhead 2 Output Receptacle
J29
Coldhead 3 Output Receptacle
P30
Input Power Connector
P31
Compressor Controller Connector
P/J32
Cryo Remote Controller
J/P18
PWB Power Input
J/P19
PWB Control Input
J/P20
PWB Remote Input
J/P21
PWB Cryo 1 Input
J/P22
PWB Cryo 2 Input
J/P23
PWB Cryo 3 Input
K1
Cryo 1 Control Relay
K2
Cryo 2 Control Relay
K3
Cryo 3 Control Relay
K4
Compressor Control Relay