MLA150
5 System Startup
34
User Guide
At each startup, the menu checks for necessary component initializations. A
window shows the status of hardware initialization
5.2 Powering Down
Powering down in emergency case:
In case of emergency, press the
EMERGENCY OFF
button at the front of the flow box.
Standard power down procedure
Close the
Exposure Wizard
by selecting
File
Exit
from
the menu bar.
Shut down the User PC.
Press the red
Off (
0
)
– button.
The system shuts down.
Complete Shutdown
Execute the standard power down procedure and then turn off the
main breaker that is located on the front of the power distribution
rack at the bottom of the electronics rack (see
3.2 Electronics Rack
).
Note:
In general, the system should be powered down completely only if
absolutely necessary. If the exposure laser is off, idle power consumption of
the system is low, and keeping it in standby enhances stability.
We do not recommend to power down the system if the idle time period is
less than at least one week.
Powering down for maintenance
The main circuit breaker in the bottom compartment of the electronics cabinet is
equipped with holes for a padlock. If the system is powered down for maintenance or
servicing, after above steps, secure the main circuit breaker in the Off position with such
a padlock.
On (
I
)
Off (
0
)
Emergency Off
Summary of Contents for MLA150
Page 1: ...User Guide MLA150 Maskless Aligner...
Page 10: ...MLA150 1 Introduction 4 User Guide...
Page 16: ...MLA150 2 Safety 10 User Guide 2 7 Labels Flowbox front E Rack REAR DOOR FRONT DOOR...
Page 17: ...MLA150 2 Safety User Guide 11 Optics cover front cover side covers rear cover...
Page 18: ...MLA150 2 Safety 12 User Guide...
Page 68: ...MLA150 6 Job Setup 62 User Guide...
Page 75: ...MLA150 7 System Utilities and Tools User Guide 69 Figure 16 BSA marker zones overview...
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