HEIDELBERG MLA150, User Manual

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MLA150
4 Wizard Description
User Guide 29
Alignment Info
This info box has two tables:
Expose Cross Positions shows the positions of the alignment crosses set during the
setup of the layer previous to the layer with the design that is to be aligned. For
instance, when setting up the First Exposure job the coordinates of the exposure
crosses for the next layer can be determined and exposed together with the First
Exposure layer.
Align Cross Positions shows the positions of the alignment crosses taken from the
template file. For orientation regarding the location of the coordinate pairs on the
substrate see
3.3 Orientation of Stage and Design .
Progress Info
The Progress Info box gives information about the progress of the exposure.

Exposure Status shows the status of the exposure job.

Design Number shows the number of the design that is being exposed.