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MLA150
4 Wizard Description
28
User Guide
4.2.3 INFO SECTION
The Info Section consists of four subsections:
Exposure Info
Alignment Info
Progress Info
Hardware Info
Exposure Info
Job Name
is a combination of the word job and the job number. It is editable in the
Job
frame by double-clicking into the
Job Name
value field.
No.
shows the auto-incrementing number of the job, it is not editable.
Substrate Size[mm]
shows the size of the substrate that is currently loaded.
Design Name
shows the name of the design that is currently loaded.
Design Size [mm]
shows the size of the design.
Dose [mJ/cm²]
shows the exposure energy for the current job.
Height
shows the height of the substrate on the cuck.
Layer
shows the layer that is currently being prepared for exposure.
Mode
shows the exposure quality level chosen at conversion.
Quality
means high
level,
Fast
means lower quality level but faster completion.
Defoc
shows the defocus value selected for the current exposure. The defoc with a
range between -10 to 10 allows fine tuning of the exposure focus (for more
information see
3.1.3 Optics System: Pneumatic Autofocus
). This value can be
adjusted before starting the design exposure (
6.8 Expose Design
)
Summary of Contents for MLA150
Page 1: ...User Guide MLA150 Maskless Aligner...
Page 10: ...MLA150 1 Introduction 4 User Guide...
Page 16: ...MLA150 2 Safety 10 User Guide 2 7 Labels Flowbox front E Rack REAR DOOR FRONT DOOR...
Page 17: ...MLA150 2 Safety User Guide 11 Optics cover front cover side covers rear cover...
Page 18: ...MLA150 2 Safety 12 User Guide...
Page 68: ...MLA150 6 Job Setup 62 User Guide...
Page 75: ...MLA150 7 System Utilities and Tools User Guide 69 Figure 16 BSA marker zones overview...
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