A540-55-880 Issue D
Page 14
© Edwards Limited 2015. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
2.7
Tracer gas analysis
Tracer gas fugitive emission testing was carried out in accordance with the method given in
A 50 mm duct was connected to the extraction port on top of the enclosure.
Table 10 - Tracer gas test parameters
Test Parameters
Tracer gas
SF
6
(Sulphur Hexafluoride)
Tracer gas concentration
100%
Tracer gas release rate
0.25 to 1 slm
Tracer gas release points
Tracer gas flow evenly split between 2 release points
1) exhaust flange on pump
2) exhaust elbow joint within exhaust extraction cover
Table 11 - Tracer gas test system parameters
System Parameters
iXL600/
iXL1000
iXL600N/
iXL1000N
Units
Extraction flow rate:
From port on top of enclosure
180
180
m
3
/h
Volume of enclosure
0.11
0.11
m
3
Free volume of enclosure
0.069
0.068
m
3
Air changes per minute
43.5
44.3
per min
Table 12 - Worst case test results
Process Gas
Maximum
Gas Flow
(slm)
TLV/LEL
(ppm)
25% TLV/
LEL
(ppm)
SF
6
Release
rate (slm)
Max SF
6
Detected
outside
enclosure
ERC
(ppm)
Pass/
Fail
*
*
Where Pass indicates acceptable enclosure (satisfies SEMI S2 criteria of less than 25.0% of the TLV).
Chlorine
Cl
2
0.2
0.5
0.125
1
0.25
0.05
Pass
Ammonia
NH
3
20
25
6.25
1
0.25
5.00
Pass
Carbon Monoxide
CO
0.3
1
0.25
1
0.25
0.08
Pass
Fluorine
F
2
0.5
25
6.25
1
0.25
0.13
Pass
Hydrogen
H
2
30
4000
1000
1
0.25
7.50
Pass
Methane
CH
4
0.05
1000
250
1
0.25
0.01
Pass
Nitrous Oxide
N
2
O
20
50
12.5
1
0.25
5.00
Pass
Nitrogen Trifluoride
NF
3
0.5
10
2.5
1
0.25
0.13
Pass
Hydrogen Chloride
HCI
0.4
5
1.25
1
0.25
0.10
Pass
Sulphur
Hexafluoride
SF
6
0.2
1000
250
1
0.25
0.05
Pass
Silicone
Tetrachloride
SiCl4
0.1
1
0.25
1
0.25
0.03
Pass
