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Page 19
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Installation
A540-55-880 Issue D
3. Use the trapped O-ring seal and clamp supplied to connect the exhaust outlet (
, item 17) on the exhaust
pipe to the exhaust extraction system.
Figure 8 - Connecting the pump inlet
3.4
Connect to the factory extraction system (optional)
An extraction port is provided to allow secondary exhaust ventilation. When connected to the Photohelic switch/
gauge accessory, the system will continuously monitor the airflow from the enclosure and if interrupted it will stop
the pump in combination with the Disconnect Box accessory.
for extraction rates required and to
for the required exhaust extraction cover kit.
, item 7 for location of the extraction port.
3.5
Connect the nitrogen supply
CAUTION
Ensure that the nitrogen supply conforms to the requirements given in the Technical Data Section. If it doesn’t,
the gas pipelines may become blocked or the system may be damaged.
, item 14 for the location of the nitrogen purge port. Refer to
for instructions on gas
module configuration.
Note:
Only the ‘N’ variants have the facility for a nitrogen purge. Refer to
for nitrogen supply
requirements.
WARNING
A release of nitrogen has potential to cause harm by asphyxiation. The nitrogen supply should
enable isolation in accordance with SEMI S2-0200 Lockout/Tagout requirements.
Undo screws
Remove cover
