Edwards iF1800, Instruction Manual

Page: 6 / 126

A533-23-880 Issue C
Page ii © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
3.6.1 iF1800 Systems ..........................................................................................................37
3.7 Install or replace the Pump Display Terminal and optional accessories (if necessary) ......................38
3.7.1 Install the Pump Display Terminal ...................................................................................38
3.7.2 Install optional accessories ............................................................................................38
3.8 Connect the iF inlet to your vacuum system .......................................................................38
3.9 Connect the iF exhaust outlet to your exhaust-extraction system ..............................................39
3.10 Connect to your factory extraction system (optional) ............................................................41
3.11 Connect the nitrogen supply ..........................................................................................41
3.12 Leak test the system ...................................................................................................41
3.13 Install additional safety equipment ..................................................................................44
3.14 Connect to your emergency stop circuit (optional) ...............................................................44
3.15 Electrical supply and RF earth (ground) connections .............................................................44
3.15.1 Reconfigure the iF system for your electrical supply (if necessary) ............................................44
3.15.2 Connect the electrical supply to the iF system ....................................................................47
3.15.3 Connect an additional RF earth (optional) ..........................................................................47
3.16 Refit the enclosure panels ............................................................................................48
3.17 Connect the cooling-water hoses .....................................................................................48
3.18 Adjust the interstage purge flow rates if necessary ..............................................................49
3.19 Commission the iF system .............................................................................................49
3.19.1 Switch on an iF1800 system ...........................................................................................49
4 Pump display terminal menus and display formats ........................................ 51
4.1 Introduction .............................................................................................................51
4.2 General operation ......................................................................................................51
4.3 The CANCEL button .....................................................................................................52
4.4 Display text and variable text ........................................................................................52
4.5 Wrap-around .............................................................................................................53
4.6 Timeout ..................................................................................................................53
4.7 Menu structure ..........................................................................................................53
4.8 Example ..................................................................................................................53
5 operation ......................................................................................... 81
5.1 Introduction .............................................................................................................81
5.2 Configure the system (optional) ......................................................................................81
5.3 Change the display format ............................................................................................82
5.3.1 Change the normal display ............................................................................................82
5.3.2 Change the display units ...............................................................................................82
5.4 Take and release control ..............................................................................................82
5.6 Check the nitrogen pressure and adjust if necessary .............................................................83
5.7 Monitor the status of the iF system ..................................................................................84
5.8 Warning and alarm indications .......................................................................................84
5.9 Manual shut-down ......................................................................................................85
5.10 Automatic shut-down ..................................................................................................85
5.11 Emergency stop .........................................................................................................87
5.12 Restart the HMB pump after automatic pump shut-down ........................................................87
5.13 Restart the iF system after an emergency stop or automatic shut-down ......................................87
5.14 Operation of the iF system components ............................................................................88
5.15 Operation of the load-lock pump .....................................................................................88
6 maintenance ..................................................................................... 89
6.1 Safety ..................................................................................................................... 89
6.2 Correct use of tube fittings ...........................................................................................90
6.2.1 Fit a tube fitting ........................................................................................................90
6.2.2 Reconnect a tube fitting ...............................................................................................90
6.3 Maintenance frequency ................................................................................................91
6.4 Inspect the connections, pipelines, cables and fittings ..........................................................91
6.5 Check the purge gas flow rates .......................................................................................91
6.6 Inspect and clean the exhaust-silencer, elbow and check-valve ................................................91