© Edwards Limited 2009. All rights reserved.
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INSTALLATION
A533-23-880 Issue C
3
INSTALLATION
3.1
Safety
Only Edwards engineers may install the iF pump series. Users can be trained by Edwards to conduct the tasks
described in this manual, contact your local service centre or Edwards for more information.
Ensure that the installation technician is familiar with the safety procedures which relate to the products
pumped. Wear the appropriate safety-clothing when you come into contact with contaminated components.
Dismantle and clean contaminated components inside a fume-cupboard.
Do not remove the temporary cover or blanking plate from the iF system inlet until you are ready to connect
the iF system to your vacuum system. Do not operate the iF system unless the inlet blanking plate is fitted or
the iF system is connected to your vacuum system.
Do not remove the temporary cover or blanking plate from the iF system exhaust until you are ready to
connect the iF system to your exhaust-extraction system. Do not operate the iF system unless the exhaust is
connected to your exhaust-extraction system.
Vent and purge the process system (if the iF system is to replace an existing pumping system) with nitrogen
for 15 minutes before you start installation work.
Disconnect the other components in the process system from the electrical supply so that they cannot be
operated accidentally.
Electrical, nitrogen and water supplies are all potentially hazardous energy sources. Before carrying out any
maintenance, the supply of these sources should be locked and tagged out.
Do not reuse any 'O' ring or 'O' ring assembly and do not allow debris to get into the iF system during
installation.
Pump system includes provision for ventilation extraction and secondary containment of oil and water leaks.
Any unintended overflows or spills must be removed immediately to avoid risk of slips.
Route and secure cables, hoses and pipe-work during installation to avoid possible risk of trips.
Obey all national and local rules and safety regulations when you install the iF system.
Consult Edwards publication P300-20-000 (Vacuum Pump and Vacuum System Safety) before you pump
hazardous materials. This publication is available on request: contact your supplier or Edwards.
3.2
Installation checklist
The operations required to install the iF system and the sections of this instruction manual which describe those
operations are shown in Table 11.
WARNING
You must use suitable lifting equipment to move the iF system. It is too heavy to lift by hand.
WARNING
The iF system is introduced for use on Load-lock chamber applications only. The pump is not
configured for transfer or process use.
