© Edwards Limited 2009. All rights reserved.
Page 41
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INSTALLATION
A533-23-880 Issue C
3.10
Connect to your factory extraction system (optional)
As supplied, the temperature control system fitted is sufficient to maintain the iF system at the correct operating
temperature; you do not need to connect an air-extraction system to the iF system. However, if required you can
connect your factory extraction system to the air-extraction port on the top of the main enclosure. Note that the iF
system is supplied with a finger-guard fitted over the main enclosure port.
3.11
Connect the nitrogen supply
CAUTION
Ensure that your nitrogen supply conforms to the requirements given in Section 2. If it does not, the flow sensors
may not operate correctly, the gas pipelines may become blocked or the iF system may be damaged.
Connect your nitrogen supply to the iF system through the nitrogen inlet on the rear of the iF system (Figure 4, item
4).
Use rigid metal supply pipelines (such as stainless steel). We recommend that the nitrogen supply pipeline to the iF
system has an outside diameter of 1/4 inch, and that the pipeline is designed and constructed so that large pressure
drops are not introduced into the nitrogen supply.
Use the Tube fittings in the fitting-kit to connect your nitrogen pipeline to the iF system: use the Tube fittings as
described in Section 6.2.
3.12
Leak test the system
Note:
If you need further information on leak testing, contact your supplier or Edwards for advice.
Leak-test the system after installation and seal any leaks found. Dangerous substances which leak from the system
will be dangerous to people and there may be a danger of explosion if air leaks into the system.
Use pump down test with helium to leak test the pump. We recommend that the leak rate is 1x10
-5
mbar ls
-1
(1x10
-3
Pa l s
-1
) helium or less for the complete system, or 1x10
-6
mbar l s
-1
(1x10
-4
Pa l s
-1
) helium or less for any individual
leak.
The iF system is supplied with a blanked leak-test port, as shown in Figure 18. To connect to this port:
1. Remove the 3/8 inch BSP blanking plug from the port (3).
2. Fit a suitable NW25 klein adaptor and 'O' ring and (if required) an elbow to the port, then connect your leak test
equipment to the adaptor or elbow.
WARNING
A release of nitrogen has potential to cause harm by asphyxiation. The nitrogen supply should
enable isolation in accordance with SEMI S2-0200 Lockout/Tagout requirements.
WARNING
Leak-test the system after installation and maintenance and seal any leaks found, to prevent
leakage of dangerous substances out of the system and leakage of air into the system.
