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maintenance
A533-23-880 Issue C
6.3
Maintenance frequency
The iF system requires little user maintenance. The maintenance operations you can carry out are described in the
following sections. The frequency of maintenance operations depends on your process. Adjust the frequency of
maintenance operations according to your experience.
When you maintain the iF system, use Edwards maintenance and service kits. These contain all of the necessary seals
and other components necessary to complete maintenance operations successfully.
6.4
Inspect the connections, pipelines, cables and fittings
Note:
Refer to Section 6.2 if you have to connect, disconnect or tighten Tube fittings.
1. Remove the enclosure side and top panels: refer to Section 3.4.
2. Check that all the cooling-water connections are secure; tighten any loose connections. Inspect all cooling-
water pipelines, hoses and connections and check that they are not corroded or damaged and do not leak; repair
or replace any pipelines, hoses and connections that are corroded or damaged, or which leak.
3. Check that all the nitrogen connections are secure; tighten any loose connections. Inspect all nitrogen pipelines
and connections and check that they are not corroded or damaged and do not leak; repair or replace any
pipelines and connections that are corroded or damaged, or which leak.
4. Check that all electrical connections are secure; tighten any loose connections. Inspect all electrical cables and
connectors for damage; replace any cables and connectors that are damaged.
5. Check that all process and exhaust connections are secure; tighten any loose connections. Inspect all process
and exhaust pipelines and fittings and check that they are not corroded or damaged; replace any pipelines or
fittings that are corroded or damaged.
6. Refit the enclosure side and top panels: refer to Section 3.16.
6.5
Check the purge gas flow rates
Use the Service/Gas valve control menu to regularly check the purge gas flow rates against the nominal flow rates
shown in Table 16.
6.6
Inspect and clean the exhaust-silencer, elbow and check-valve
Note:
This may require new NW40 trapped O’Rings.
Use the following procedures to dismantle, clean and refit the exhaust system. Refer to Figure 1.
1. Remove the NW40 clamp and trapped 'O' ring on the outlet flange of the check-valve (18) to disconnect the iF
system from your exhaust-extraction pipeline. Dispose of the trapped 'O' ring.
2. Remove the exhaust enclosure (26) by removing the screws connecting to the rear bulkhead cover.
3. Remove the rear cover by removing the screws that secure the rear cover
4. Remove the NW40 clamp and trapped 'O' ring which secures the check-valve (18) to the elbow (20) and remove
the check-valve. Dispose of the trapped 'O' ring.
WARNING
The substances that accumulate in the exhaust-pipe, elbow and check-valve can be dangerous. Do
not allow these substances to come into contact with your skin or eyes. Do not inhale the vapours
from these substances. Fit blanking caps to the inlet and outlet flanges when you move the
exhaust-pipe, elbow or check-valve around your workplace.