EBARA EV-S100, Instruction Manual

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P.87
8. Disconnection and Transportation
WARNING When the pump has been used for exhausting highly toxic
gases such as arsenic and mercury compounds, be sure to
contact EBARA Corporation before you return the pump.
CAUTION In the interest of safety during the transportation, disassembly
and cleaning of the pump, be sure to take note of the gases
that have been handled.
Toxic gases may be generated from by-products in the piping or pump in pump
disconnection from the tool piping for repair and replacement or flange removal for
maintenance. Gain relevant information about the process gases from your tool
suppliers, and be sure that the gas concentrations in the work areas are at quarter or
under the acceptable values specified using appropriate measurement equipment.
Without assurance of gas safety, instruct the workers to wear proper personnel
protective equipment if necessary to protect them from gas hazards. The personnel
protective equipment must include at least gloves, safety goggles, and a gas mask.
To disconnect and transport the pump, proceed as follows.
(1) Stop the pump and replace all gases inside the pump by purging them with
N
2
gas.
(2) Switch off the power supply to the pump and remove the power and signal
wires.
(3) After you have fully closed the N
2
regulator remove the N
2
pipe, seal off the
N
2
purge port with a sealing flange.
(4) Remove the cooling water pipes.
(5) Remove the vacuum and exhaust pipes and completely seal off the
suction and exhaust ports of the pump with a blind flange or similar seal.
Seal off all process gas discharge points such as the differential port by
using a blind flange.
[ notes ] Differential port is option.
PM10U
EBARA
CORPORATION