EBARA EV-S100, Instruction Manual

Page: 100 / 113

P.81
CAUTION The pump will not stop when an WARNING signal is generated.
When pump operation is continued in this condition an ALARM
signal will be generated or a serious breakdown will occur. Be
sure therefore to check the pump in accordance with the
instructions of Section 10. "Troubleshooting" after the process
plant has completed 1 cycle.
CAUTION When a ALARM signal has been generated in the REMOTE
operating mode, do not start the maintenance tasks until you
have interrupted the external start signal. When the external
ALTERNATE start signal input is maintained, the pump will start
while the ALARM is being reset.
If any abnormal symptoms other than those displayed on the LCD controller
appear, take action in accordance with the instruction of Section 10.
"Troubleshooting".
When the BZ.OFF button is pressed in the BUZZER Enable mode, the buzzer will
stop even during a warning status.
7.3 Vacuum and Exhaust Piping
WARNING Maintenance on the vacuum and exhaust piping shall be
performed by taking proper action to avoid the dispersion of
inflammable, toxic and/or hazardous substances and to prevent
physical contact with, and absorption of, these substances.
WARNING The pump and exhaust piping will remain at a high temperature
during operation and for a short time after the pump has
stopped.
Be sure to avoid contact and keep inflammable substances out
of reach.
Do not remove the outer cover during operation.
PM10U
EBARA
CORPORATION