P.68
PM10U
EBARA
CORPORATION
10.4 Troubleshooting (4) Option
WARNING
Interrupt Earth Leakage Breaker (ELB)and lockout before
starting on wiring and maintenance work.
Do not switch on the power supply to the pump until work is
completed.
WARNING
The pump casing and exhaust piping become extremely hot
during operation and for some time after stopping.
Be sure that pump and exhaust piping do not come in contact
with humans or inflammable substances.
Do not remove the pump cover during operation.
WARNING
Check for gas leaks after installing and maintaining the piping.
Gas leaks will result in the discharge of harmful and
dangerous substances and in abnormal reactions due to the
ingress of air into the pump. When checking for gas leaks by
pressurization,
please pressurize by less than 0.05 MPa into
the purge port and do check.
Display
Symptom
Check Item
Corrective Action
Tube fittings are loosened.
Re-tighten.
ALARM:
WATER LEAKAGE
Water leakage
Instrument failure
Replace instrument.
Exhaust valve is closed.
Check exhaust pipe.
ALARM:
BACK PRESS.HIGH
Exhaust pressure
rises.
Instrument failure
Replace instrument.
Exhaust valve is closed.
Check exhaust pipe.
WARN:
BACK PRESS. ##.#
Exhaust pressure
rises.
Instrument failure
Replace instrument.
ALARM:
EMERGENCY STOP
Emergency Stop
switch
Stop by emergency Stop
button.
Check that pump can be
operated and turn the
button head to release
lock.
After you have taken the remedial actions above, reset the pump. If the problem
that has caused the ALARM signal still remains, the ALARM display will appear
again even after you have reset.
During REMOTE operation carry out the above procedures after you have
turned off the external start signal.
When the external start signal remains on in the ALTERNATE mode, the pump
will start immediately when the RESET signal is applied.