P.22
PM10U
EBARA
CORPORATION
1
13
25
14
Screw lock size : M2.6
Contact pin surface : Au
Fig. 4.6 25 Pin D Sub-Miniature Female Receptacle
(As seen from connecting side)
Table 4.6 Control Connector Pin Assignment(CN-Y)
Pin No.
Signal name
I/O
Signal type
1
RESET (+)
IN
RESET
：
CLOSE
2
LOW SPEED CONTROL
(+)
IN
LOW SPEED
：
CLOSE, Alternate
3
RESERVED (+)
IN
4
RESERVED (+)
IN
5
RESERVED (+)
IN
6
EMO STATUS (+)
OUT
Abnormality
：
OPEN, Alternate
7
PUMP N2 WARNING STATUS (+)
OUT
Abnormality
：
CLOSE, Alternate
※
1
8
RESERVED (+)
OUT
9
LOW SPEED CONTROL
(+)
OUT
LOW SPEED
：
CLOSE, Alternate
10
BACK PRESSURE HIGH WARNING STATUS
(+)
OUT
Abnormality
：
CLOSE, Alternate
※
1
11
RESERVED (+)
OUT
12
RESERVED (+)
OUT
13
−
14
RESET (
−
)
15
SAVING ENERGY CONTROL (
−
)
16
RESERVED (
−
)
17
RESERVED (
−
)
18
RESERVED (
−
)
19
EMO STATUS (
−
)
20
PUMP N2 WARNING STATUS (
−
)
21
RESERVED (
−
)
22
LOW SPEED CONTROL
(
−
)
23
BACK PRESSURE HIGH WARNING STATUS
(
−
)
24
RESERVED (
−
)
25
RESERVED (
−
)
※
1 It can change to “Abnormality
：
OPEN, Alternate
“
by DIP SW. setting.