
EBARA Multi-Stage Dry Vacuum Pumps
Table of Contents
930601-P
i
Summary of Requirements ........................................................................ 4
2.1.1 Nitrogen Flow .................................................................................. 4
2.1.2 Cooling Water ................................................................................. 4
2.1.3 Lubricating Fluid.............................................................................. 4
2.1.4 Pump Overhaul ............................................................................... 5
80X25 ........................................................................................................ 7
2.2.1 80x25 Specifications ....................................................................... 7
2.2.2 80x25, Side View ............................................................................ 8
2.2.3 80x25, Gear End ............................................................................. 9
2.2.4 80x25, Motor End.......................................................................... 10
2.2.5 80x25, Top View ........................................................................... 11
Water Piping ............................................................................................ 13
3.3.1 Cooling Water Requirements:....................................................... 14
Pre-Start Check ....................................................................................... 17
4.2.1 Initial Positioning ........................................................................... 17
4.2.2 Lubricating Fluid Reservoirs.......................................................... 17
4.2.3 Vacuum Piping.............................................................................. 17
4.2.4 Cooling Water ............................................................................... 18
4.2.5 Nitrogen Purge .............................................................................. 18