EBARA Multi-Stage Dry Vacuum Pumps
Troubleshooting
930601-P
43
Table 1:
Trouble
Possible Causes
Solutions
Lubricating fluid is
found in the
secondary reservoir.
Nitrogen flow across
the labyrinth seal is
blocked.
Check the Nitrogen pressure and flow
across the seals.
Pump was not turned
off and vented to
atmosphere before
removing the lubricating
fluid fill plug.
Drain the secondary reservoir.
Lubricating fluid is
found in the dry
pump swept volume.
The lubricating fluid fill
plug was opened while
the pump was running.
Depending on the amount of
lubricating fluid, the pump may have
to be torn down and cleaned. Contact
your Ebara representative.
Pump is causing
excessive vibration.
Pump is not level.
Level the pump.
Pump is not on rubber
cushions.
Ensure that the pump is on the rubber
cushions provided.
Pump package has
shut down, and the
trouble light is on.
Lubricating fluid level
low.
Check lubricating fluid levels in each
reservoir: refill if necessary.
Cooler tubes restricted
due to inadequate P/M,
or MFC failure in the
tool.
Open cooler bonnets and examine
cooler tubes for flow restrictions and
clear any restrictions; reset current
trip switches inside the control panel;
restart the pump.
Restricted exhaust
possibly due to
moisture in the house
exhaust, or metal etch
deposit.
Check the exhaust line for flow
restrictions; reset current trip switches
inside the control panel; restart the
pump.
If the pump fails to restart after
completing the above, contact the
Ebara Service Center.