
EBARA Multi-Stage Dry Vacuum Pumps
Overview
930601-P
5
!
CAUTION
It is very important that the lubricating fluid is maintained at the proper level.
Failure to do so could result in severe damage to the pump.
!
CAUTION
When changing or replenishing lubricating fluid, be sure to stop the pump and
allow the pump to return to atmospheric pressure. Because the lubricating fluid
reservoir is under vacuum, the pump can be severely damaged if the lubricating
fluid port is removed while the pump is in operation, or not at atmosphere.
!
CAUTION
Before attempting to add any lubricating fluid into the pump, it is imperative that
the secondary reservoirs are drained first. Failure to do so could result in
lubricating fluid being forced into the vacuum area of the pump.
!
NOTICE
Use Krytox 1525, Fomblin Y-LVAC 25/6, Barrierta J100.
Previously specified Krytox 1514, Fomblin Y-LVAC 16/6, Barrierta J60 may be
used if supplied with pump.
There are four lubricating fluid reservoirs on each pump module: Two primary, and two
secondary reservoirs. A secondary lubricating fluid reservoir is provided for each pump
for each primary lubricating fluid reservoir. Over a period of time, a small amount of
lubricating fluid may migrate from the primary to the secondary reservoirs.
All primary reservoirs must be filled to the upper limit line in the sight glass. Do not
overfill. All secondary reservoirs should always be drained before lubricating fluid is
added or changed in the primary reservoirs.
The pump must be off and at
atmosphere before lubricating fluid can be added or changed
. If lubricating fluid is
not drained from the secondary reservoirs, lubricating fluid could eventually be forced
into the vacuum chamber of the pump.
Occasionally process gasses may discolor the lubricating fluid sight glass, making it
difficult to read lubricating fluid levels. The sight glass can be removed and cleaned
whenever the lubricating fluid is being changed.
2.1.4
Pump Overhaul