
EBARA Multi-Stage Dry Vacuum Pumps
Pump Maintenance
930601-P
20
5.0 Pump Maintenance
5.1
Safety Issues
!
DANGER
Thoroughly purge the pump for at least 15 minutes to remove all toxic gases
before opening the pump for any reason.
!
WARNING
Allow the pump to cool before attempting any maintenance.
!
CAUTION
When changing or replenishing lubricating fluid, be sure to stop the pump and
allow the pump to return to atmospheric pressure. Because the lubricating fluid
reservoir is under vacuum, the pump can be severely damaged if the lubricating
fluid port plug is removed while the pump is in operation, or not at atmosphere.
!
NOTICE
The descriptions and instructions included in this manual are for a typical pump
installation. Documentation specific to this pump installation has been included
in the Attachments section. This section is located at the back of this manual.
Please refer to the Attachments section for installation-specific information.
5.2
Weekly Maintenance
It is important to check the following points at least once a week:
a.
Lubricating Fluid Level (between upper and lower lines on lubricating fluid sight
glass).
b.
Lubricating Fluid Color.
c.
Excessive or Unusual Noise.
d.
Motor Running Current.
e.
Cooling Water Flow (pump modules and gas coolers).