EBARA Multi-Stage Dry Vacuum Pumps
Installation
930601-P
14
1. Open the control panel.
2. Gradually reducing the flow of cooling water until the LED on the delay timer
comes on.
3. When the light comes on, stop reducing the flow and check the flow meter for
the actual flow.
4. Check this value against the setting. Adjust the as needed, and recheck again
by reducing the flow until the LED comes on.
!
CAUTION
Use industrial water for cooling. The use of de-ionized water may cause
corrosion of the pump internal parts. If de-ionized water is used, stainless steel
plumbing is required. Use of a filter before the pump inlet is recommended. If
the ambient temperature is expected to drop below freezing, and the pumps are
not expected to be run, blow out all water from the pumps with compressed air.
3.3.1
Cooling Water Requirements:
Flow:
Motor and module:
5.0-8.0 lpm
1.3-2.1 gpm
Gas coolers:
0.8-1.2 lpm
0.21-0.32 gpm
Water flow less than 1 liter per minute to coolers will cause cooler corrosion.
Pressure (Operating)
<4 kgf/cm2
60 psi
Inlet - Outlet Differential
1.0-2.0 kgf/cm2
14-28 psi
Temperature (max)
30°C
86°F
Connections:
3/8: NPT Female
(See “50x20 Specifications”.)
3.4
Nitrogen Purge Piping
A Nitrogen gas purge is used for labyrinth seal purge and gas dilution. The flow rates to
the individual stages have been preset at Ebara by factory personnel and should not be
adjusted in the field.
3.4.1
Nitrogen Supply Requirements
Supply Pressure:
1.0-7.0 kgf/cm2
14-100 psi
Regulated Pressure:
.9-1.1 kgf/cm2
14-21 psi
Connections:
1/4 inch tube
Flow:
5.0 - 8.0 lpm
.2 - .3 cfm
Excluding exhaust gas dilution, if applicable. (Process & Pump Specific. See
Attachments in the back of the book.)