Global Innovators in Technology
Multi-Stage Dry Vacuum Pumps
Installation — Operation — Maintenance
Manual
Pump Model 80x25
EBARA Technologies, Incorporated51 Main AvenueSacramento, CA 95838(916) 920-5451; Fax: (916) 925-6654
Page 1: ...nnovators in Technology Multi Stage Dry Vacuum Pumps Installation Operation Maintenance Manual Pump Model 80x25 EBARA Technologies Incorporated 51 Main Avenue Sacramento CA 95838 916 920 5451 Fax 916...
Page 2: ...Copyright 1993 by EBARA Technologies Inc...
Page 3: ...g or operation could affect performance and could result in accidents causing injury to personnel This manual has been prepared to illustrate how to properly install operate and maintain the pump A st...
Page 4: ...rent prices for parts labor and transportation Supplier assumes no responsibilities for damages caused by improper installation or by operation in violation of the equipment s rated operation conditio...
Page 5: ...or nonconformity in the Product In all cases Supplier has responsibility for determining the cause and nature of failure and Supplier s determination with regard thereto shall be final If it is found...
Page 6: ...Record of changes Rev Date Pag e Position Contents Reason A 12 12 97 New Release per ECO 2905...
Page 7: ...allation 12 3 1 Unpacking and Initial Positioning 12 3 1 1 Pump Location 12 3 1 2 Leveling Pads 12 3 1 3 Shipping Hardware 12 3 1 4 Lubricating Fluid Reservoirs 12 3 2 Vacuum Piping 13 3 3 Water Pipin...
Page 8: ...Current 26 5 7 Nitrogen Purge Flow 27 5 7 1 Nitrogen Supply Requirements 27 5 8 Cooling Water Flow Rate 27 5 8 1 Cooling Water Requirements 27 5 9 Ultimate Pressure 28 5 10 Cooler Inspection and Clean...
Page 9: ...he improper operation or service of the equipment 1 1 1 Electrical Grounding All electrical connections must be properly grounded in accordance with equipment specifications and in compliance with all...
Page 10: ...aintain proper oil level is an example of where a Caution label would appear Safety Instructions SAFETY INSTRUCTIONS Safety Instruction notices provide specific instructions about avoiding or preventi...
Page 11: ...is icon indicates potential harm due to extreme heat Warning indicates that severe injury could occur Mechanical Damage CAUTION This icon indicates potential mechanical damage Caution indicates that d...
Page 12: ...low meter wide open Flow will stabilize around 5 8 lpm 2 1 2 Cooling Water The purpose of the cooling water is to cool motors gears and gas coolers interstage coolers Pressure must be less than 4 kgf...
Page 13: ...ierta J60 may be used if supplied with pump There are four lubricating fluid reservoirs on each pump module Two primary and two secondary reservoirs A secondary lubricating fluid reservoir is provided...
Page 14: ...e During overhaul service all bearings labyrinth seal rings and O rings are replaced coolers are cleaned or exchanged and the pump internals area cleaned wet bead finished and vacuum baked The overhau...
Page 15: ...CURRENT FULL LOAD VOLTAGE RPM INLET OUTLET Flanging INLET EXHAUST PRESSURE QUANTITY C O O L I N G INLET PRESSURE PRIMARY SECONDARY QUANTITY LUBRICATING FLUID WEIGHT APPROX REMARKS N2 P U R G E 2 2 kW...
Page 16: ...EBARA Multi Stage Dry Vacuum Pumps Overview 930601 P 8 2 2 2 80x25 Side View Typical Configuration Refer to Attachments for Specific Information...
Page 17: ...EBARA Multi Stage Dry Vacuum Pumps Overview 930601 P 9 2 2 3 80x25 Gear End Typical Configuration Refer to Attachments for Specific Information...
Page 18: ...EBARA Multi Stage Dry Vacuum Pumps Overview 930601 P 10 2 2 4 80x25 Motor End Typical Configuration Refer to Attachments for Specific Information...
Page 19: ...EBARA Multi Stage Dry Vacuum Pumps Overview 930601 P 11 2 2 5 80x25 Top View Typical Configuration Refer to Attachments for Specific Information...
Page 20: ...nt temperature 3 1 2 Leveling Pads Extend the leveling pads and level the pump Each castor includes an adjustable pad that extends making the pump immobile Adjust the pads to level the pump The pump m...
Page 21: ...foreign particles from entering the pump Always cover the inlet of the pump when it is not connected to the vacuum piping This is to prevent the entry of any foreign materials Completely remove any we...
Page 22: ...run blow out all water from the pumps with compressed air 3 3 1 Cooling Water Requirements Flow Motor and module 5 0 8 0 lpm 1 3 2 1 gpm Gas coolers 0 8 1 2 lpm 0 21 0 32 gpm Water flow less than 1 li...
Page 23: ...or 208 volt 3 phase 4 wire service A main circuit breaker receives the incoming power conductors and provides over current protection The power to each motor is controlled by a contactor An overload r...
Page 24: ...lay contact can be connected to terminals D1 and D2 When the relay contact is crossed the pump will run when the relay contact is open the pump will stop 3 6 Initial Check Check the cooling water and...
Page 25: ...for a typical pump installation Documentation specific to this pump installation has been included in the Attachments section This section is located at the back of this manual Please refer to the At...
Page 26: ...ion and is process dependent See Nitrogen Supply Requirements 4 3 Start Up Trial Run NOTICE It is preferred that the initial startup be performed by Ebara service personnel or their authorized represe...
Page 27: ...1 6 1 6 1 6 2 3 7kW 19 4 19 4 19 6 19 6 20 0 9 7 9 7 9 8 9 8 Volts 190 200 208 210 215 220 230 380 400 415 420 440 460 480 1 5kW 8 2 8 2 8 1 8 0 8 0 8 0 8 0 4 1 4 1 4 2 4 0 4 0 4 0 4 0 60Hz 2 2kW 11 2...
Page 28: ...ubricating fluid port plug is removed while the pump is in operation or not at atmosphere NOTICE The descriptions and instructions included in this manual are for a typical pump installation Documenta...
Page 29: ...ed coolers are cleaned or exchanged and the pump internals are cleaned wet bead finished and vacuum baked The overhaul requires 1 2 weeks to complete not including shipping to and from the service cen...
Page 30: ...perating the lubricating fluid level in all sight glasses should be at or above the lower limit line and no higher than the upper limit line With the pump off the lubricating fluid level should be at...
Page 31: ...hanging or replenishing lubricating fluid be sure to stop the pump and allow the pump to return to atmospheric pressure Because the lubricating fluid reservoir is under vacuum the pump can be severely...
Page 32: ...ain for several minutes to ensure sufficient drainage 9 Check and clean the O ring on the drain plug Replace the O ring if it is worn or damaged 10 Replace and tighten the drain plug 11 Remove the use...
Page 33: ...he used lubricating fluid Be sure to dispose of this lubricating fluid properly The pump is now ready for fresh lubricating fluid 8 Pour the lubricating fluid into the fill port while viewing the leve...
Page 34: ...is for comparison Check for any unusual or excessive vibration or noise If any abnormality is found 1 Check that the pump is level 2 Check the piping fittings and support 3 Check the lubricating fluid...
Page 35: ...in 10 of the specified value See 50x20 Specifications NOTICE The nitrogen purge rate has been adjusted at the factory to the required level do not adjust the needle valves located at the purge ports 5...
Page 36: ...t initial start up For initial values See Start Up Trial Run For pump specifications See 80x25 Specifications If the ultimate pressure is above the rated value or above the value obtained at start up...
Page 37: ...jacket Inspection Solid matter gradually builds up on the inside of the gas coolers when the pump is run with process gases The rate of build up is dependent on the process and wafer throughput There...
Page 38: ...is confirmed the coolers should be dried in an oven The following list summarizes the recommended cooler cleaning procedures for several common semiconductor processes If not listed below please cont...
Page 39: ...inlet side of cooler 3 This is the area that plugs first and it can be used to determine the amount of deposits in the other coolers If the 3 cooler shows heavy deposits the other coolers should be in...
Page 40: ...lace the end cap being careful not to pinch or damage the O ring Replace the centering O ring if necessary 8 Apply graphite anti seize Permatex 133A to each of the bolts to prevent galling or the tran...
Page 41: ...rapped in the pump 2 Mark the cooler bodies and end caps designating third fourth or fifth with an indelible ink pen 3 After 15 minutes turn off the Nitrogen If removing the plumbing disconnect the Ni...
Page 42: ...the bolt back and forth This will usually loosen the bolt and prevent twisting off the bolt head 6 Remove the O ring and set it aside 7 Write down the amount of build up in the coolers Photocopy and u...
Page 43: ...When finished continue to the next step 16 Use two 36 bungie cord tie downs to support the coolers on the pump 17 Connect all vacuum lines and reinstall all NW 40 and NW 25 connections and piping betw...
Page 44: ...y products that may be present upon separating the gas coolers from the pump module The Safety Representative can guide you as to the necessary safety precautions that you should take Always obtain a...
Page 45: ...te valve to the process chamber 5 After 15 minutes turn off the Nitrogen supply and the cooling water supply WARNING The coolers will still be warm and the pump s exhaust manifold will be very hot Use...
Page 46: ...d pipes and clean them If it is necessary to remove and clean the manifold pipes be sure to replace the centering rings and O rings Use ScotchBrite if the canisters need cleaning 13 Vacuum out any par...
Page 47: ...it is important to minimize the potential for gross leaks A leak into the pump package could allow moisture to react with process gasses This could cause severe damage to the pump A leak out of the pu...
Page 48: ...xamined after months of service to gauge the level of chemical build up A pressure gauge is provided to monitor increases in the exhaust line pressure the section of pipe between the final cooler and...
Page 49: ...tactor 2hp 208V 916031 Motor Contactor 3hp 208V 980754 Motor Contactor 5hp 308V 989079 Lubricant 980595 Water Flow Switch 980085 Cooler G 90 O Ring 989169 Cooler G 140 O Ring 923043 40x20 1 1 1 1 40x2...
Page 50: ...due to overcurrent Exhaust valve stuck Examine the exhaust check valve and clean if necessary or replace the exhaust valve Pump tolerances clogged with particulate Remove material by vacuuming out th...
Page 51: ...ve Pump is causing excessive vibration Pump is not level Level the pump Pump is not on rubber cushions Ensure that the pump is on the rubber cushions provided Pump package has shut down and the troubl...
Page 52: ...exhaust line or both Water found in the coolers Water leak in the coolers Change the defective cooler Water entering from the fab exhaust line Redesign the dry pump exhaust into the fab exhaust so tha...
Page 53: ...0 7404 CENTRAL REGION Ebara Technologies Inc 3019 Alvin DeVane Boulevard Bldg 3 Suite 350 Austin TX 78741 Phone 512 389 3993 Fax 512 389 3995 WESTERN REGION EBARA Technologies Inc Silicon Valley Opera...
Page 54: ...SCOTLAND EBARA Technologies Incorporated 3 Adam Square Brucefield Industrial Estate Livingston West Lothian EH 54 9DE United Kingdom Phone 44 1506 460232 Fax 44 1506 460222 6 2 3 ASIA PACIFIC RIM JAPA...
Page 55: ...hone 886 02 2560 1166 Fax 886 02 2560 1177 SINGAPORE EBARA Engineering Singapore EES No 1 Tuas Link2 Singapore 639550 Phone 65 862 3536 Fax 65 861 0589 KOREA EBARA Precision Machinery Korea Inc 15 FL...
Page 56: ...e Dry Vacuum Pumps Attachments 930601 P 48 7 0 Attachments One or more of the following items are included to cover areas specific to your pump Please refer to these attachments for further pump speci...
Page 57: ...EBARA Multi Stage Dry Vacuum Pumps Attachments 930601 P 49...
