15
Perfect Vacuum
Atmosphere Pressure
Pressurization
Vacuuming
Absolute
Pressure
1 atm
=101.3 kPa(abs)
= 1013 mbar(abs)
= 760 Torr
Gauge
Pressure
- 1 atm
= - 101.3 kPa
= - 1013 mbar
= - 760 Torr
0
0
0.65 atm
= 65.8 kPa(abs)
= 658 mbar(abs)
= 494 Torr
0.35 atm
= 35.5 kPa(abs)
= 355 mbar(abs)
= 266 Torr
- 0.35 atm
= - 35.5 kPa
= - 355 mbar
= - 266 Torr
- 0.65 atm
= - 65.8 kPa
= - 658 mbar
= - 494 Torr
15
≟
Absolute Pressure
≡
For vacuuming conditions, every value should be 0 or plus. It cannot be minus.
≟
Gauge Pressure
≡
For vacuuming conditions, every value should be 0 or minus. It cannot be plus.
≋
Reference
≝
Absolute pressure
≐
Gauge pressure
≠
1atm)
ͤ
The value for maximum pressure resistance is indicated by gauge pressure.
⅐
Note that the vacuum pressure degree in our data sheet is mainly indicated
by absolute pressure, not by gauge pressure.
REFRENCE DATA 2:
Vacuum Pressure Degree
INSTRUCTION MANUAL
Application Materials Product Division
