5-1. Shutdown Procedure
(1) Open the leak valve of the vacuum exhaust pipe. Upon confirming that the vacuum has been
released, shut down the vacuum pump.
(2) Close the valve on the liquid supply side then close the valve on the treated liquid side.
5-2. Precautions when Handling the Module during Shutdown Periods
(1) Store under the storage conditions stipulated in the specifications.
(2) Let the water flow for 30 minutes once a day to prevent bacteria growth.
(3) If the prescribed mentioned in (2) is not applicable for the use of ultrapure water, etc., it is
also effective to enclose the module by micro-pressuring an inert gas, such as nitrogen gas,
from the vacuum port of the module at 0.05MPa.
(4) In case of a long-term shutdown, remove the module from the pipe and drain the water.
Upon thorough draining, send nitrogen gas or dry air (free from oil mist, trash, etc.) from
the water supply entrance to dry the interior of the module.
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6. Restart
(1) Let the water start to flow after flushing the inside of the module.
(2) Discharge the drain of the vacuum exhaust pipe before starting the vacuum pump.
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5. Shutoff and Storage
INSTRUCTION MANUAL
Application Materials Product Division
