
S51.ZT2S/K-C1 Piezo Z/Tip/Tilt Platform User Manual
6
3.3 Motion direction
AXIS1
AXIS2
3.4 Product Features
Motion in θx, θy and Z
Closed-loop version for high accuracy
Fast response
Aperture of 80×80mm
Optional vacuum version
4. Operating environment
A clean, dustfree and non-corrosive environment
Operating temperature : -20~80℃
Relative humidity : <60%
Recommended voltage range is 0~120V for long-term use and lifetime