S51.ZT2S/K-C1 Piezo Z/Tip/Tilt Platform User Manual
14
7.4 Driving and Sensor Cables
Driving cable and sensor cable are made of polyimide line, which can be used in vacuum.
The connector interface uses 12-pin connector, the model is TGG.2B.312.CLAD62Z, and the
wiring definition is shown in the following figure:
No.
Pin definition
1
-input CH1
2
Sensor GND
3
10V
4
Drive HV_GND
5
Drive CH3
6
Drive CH2
7
Drive CH1
8
+input CH1
9
-input CH2
10
-input CH3
11
+input CH3
12
+input CH2
12-Pin male wiring diagram
12-Pin female wiring diagram
