Brooks Automation
6. Preventative Maintenance
Part Number: 319430 Rev. A
Change Cartridge
Change Cartridge
If a cartridge must be replaced, use the following procedure.
Step
Action
1.
Go to the Set-Up Menu and select
Cartridge Change
.
2.
Press
Continue
.
The stage moves inside the unit and the cap-driver cartridge is lowered and placed onto the
stage.
3.
Press
Next
.
The stage returns to the home position.
Copyright © 2019, Brooks Automation, Inc.
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