1-3
Brooks
®
Models 5965, 5851EM
Section 1 Introduction
Installation and Operation Manual
X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009
•
Remote transducer input (Note 1)
is accessed via terminal 5 on the
Card Edge or Pin 15 on the D-Connector version. This feature allows
the use of the integral control electronics and valve to regulate flow in
response to the signal from an external 0-5 Vdc signal. The mass flow
signal from the Model 5965/5851EM is still available for process
monitoring. This function is enabled at the factory. Refer to section 2-6.
Note 1: Feature not available with 4-20 mA I/O option.
•
Fast response control
permits rapid gas settling times with minimal
over/undershoot.
1-3 Specifications
PERFORMANCE CHARACTERISTICS:
Flow Ranges*
Any range from 10 - 100 slpm nitrogen equivalent; up to 200 slpm
hydrogen
*Standard: 0°C and 101 kPa (760 Torr). Per SEMI Guideline E12-96.
Accuracy
+1% Full Scale, including linearity, at calibration conditions
68
o
F + 3
o
F, 50% + R.H.
Repeatability
0.25% of rate
Settling Time
Less than 3 seconds (6 seconds for 4-20 mA I/O option) to within 2% of
Full Scale of final value for a 0-100% command step.
*Per SEMI Guideline E17-91.
Leak Integrity
Inboard to outboard 1 x 10
-10
atm. cc/sec. Helium max.
Control Range
50 to 1 (with elastomeric valve seat)
33 to 1 (with metal valve seat)
Ambient Temperature Limits
Operating: 40°F to 150°F (5°C to 65°C)
Non-Operating: -13°F to 212°F (-25°C to 100°C)
Temperature Sensitivity
Zero: Less than +0.075% full scale per degree C.
Span: Less than +1.0% of rate shift over 10 - 50
o
C range.
