2-1
Brooks
®
Models 5965, 5851EM
Section 2 Installation
Installation and Operation Manual
X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009
2-1 General
This section contains the procedures for the receipt and installation of the
instrument. See Section 1 for dimensional and connection requirements.
Do not attempt to start the system until the instrument has been
permanently installed. It is important that the start-up procedures be
followed in the exact sequence presented.
2-2 Receipt of Equipment
When the instrument is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability.
A report should be submitted to your nearest Product Service Department.
Remove the envelope containing the packing list. Outside of your clean
area, carefully remove the equipment from the packing case. Make sure
spare parts are not discarded with the packing material. lnspect for
damaged or missing parts.
This device may have been assembled, calibrated and double-vacuum
bagged in a Class 100 clean room. ln your semi-clean area, remove the
outer bag only. Pass your Model 5965/5851EM into your clean area. Note:
Remove the second clean room compatible bag only when the equipment
is ready to be tested and/or installed in your clean system.
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel (215) 362 3700
Fax (215) 362 3745
E-mail: [email protected]
www.BrooksInstrument.com
Brooks Instrument
Brooks Instrument
Neonstraat 3
1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands
Tokyo, 136-0073 Japan
P.O. Box 428
Tel +81 (0) 3 5633 7100
6710 BK Ede, Netherlands
Fax +81 (0) 3 5633 7101
Tel +31 (0) 318 549 300
Email: [email protected]
Fax +31 (0) 318 549 309
E-mail: [email protected]
