1-5
Brooks
®
Models 5965, 5851EM
Section 1 Introduction
Installation and Operation Manual
X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009
ELECTRICAL CHARACTERISTICS (continued):
Differential Pressure
Voltage I/O option
Valve orifice sized for any pressure drop between 5 to 50 psi (Minimum
pressure drop depends on gas and range). Refer to Orifice Sizing, Section
4-5.
Current I/O option
Valve orifice sized for any pressure drop between 5 to 1,500 psi (Maximum
pressure drop depends on orifice size). Refer to Orifice Sizing, Section 4-5.
Power Supply Sensitivity
Voltage I/O Option: ±0.09 full scale of percent power supply voltage
variation of full scale.
Current I/O Option: negligible effect over +22.5 to +28 Vdc.
PHYSICAL CHARACTERISTICS:
Materials of Construction
316L, 316L VAR (Vacuum Arc Remelt), and high alloy ferritic stainless
steel.
External seals: Nickel.
Internal seals: Nickel.
Valve Seat: 316L, Viton
®
fluoroelastomers, Buna-N, Kalrez
®
or Teflon
®
.
When 316L or Teflon seat is used, maximum inlet pressure is 50 psig and
minimum controllable flow rate is 3% of full scale.
Dimensions
Refer to Figures 1-2 and 1-3
Process Connections
Integrally welded to body - standard:
1/4" male VCR
TM
3/8" male VCR (3/8" or 1/2" tube)
1/2" ACLIT
TM
1/2" ATW tube stub
CS Downport (5965 Series Only)
Surface Finish
5851EM: 32Ra, Passivated,
Electropolished optional
5965: 7Ra, Electropolished
