2-5
Brooks
®
Models 5965, 5851EM
Section 2 Installation
Installation and Operation Manual
X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009
Use caution when installing surface mount (downported)
controllers. Most metal seals can not be reused after
compression. Follow the seal manufacturers’ recommendations
for installation. Tighten the mounting screws in 10 in-lb.
increments such that the seal undergoes uniform compression.
Final torque values depend on the screw and hardware material
and lubrication.
CAUTION
e. When installing controllers be aware that sharp, abrupt angles in the
system piping directly upstream of the controller may cause a small
shift in accuracy. lf possible, have at least ten pipe diameters of
straight tubing upstream of the Model 5965/5851EM Mass Flow
Controller.
Figure 2-1 Model 5965/5851EM Card Edge Connector Arrangement
CIRCUIT
SIDE OF
PC BOARD
1. CHASSIS GROUND
2. O-5 VOLT SIGNAL COMMON
3. O-5 VOLT SIGNAL OUTPUT
4. +15 Vdc SUPPLY
5. REMOTE TRANSDUCER INPUT***
6. NOT USED
7. SLOT
8. NOT USED
9. VALVE OVERRIDE
10. +5V REF.** OR VALVE RETURN OR NOT USED
* Unit designates Pins H, J, K, & L as G, H, I & J
** Jumper Selectable
*** Factory Activated Option
A. COMMAND INPUT
B. COMMANDCOMMON
C. SUPPLYVOLTAGECOMMON
D. VALVETESTPOINT/PURGE
E. NOT USED
F. -I5VdcSUPPLY
H. *SLOT
J. *NOT USED
K. *NOTUSED
L. *VALVE OFF
