4-16
Brooks
®
Models 5964, 5850EM
Section 4 Maintenance
Installation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
In the example above a Size P restrictor would be selected.
Note: If the calculated flow rate is such that two different size restrictors
could be used, always select the larger size.
If a mixture of two or more gases is being used, the restrictor selection
must be based on a Nitrogen equivalent flow rate of the mixture.
Example:
The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by volume.
The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:
Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen. In this example
a Size 4 Wire Mesh Assembly would be selected.
Table 4-4 Model 5850EM Standard Restrictors
Range
SCCM Nitrogen Equivalent Flow*
Part Number
Size
Low
High
ACLFE
Wire Mesh
D
8.038
11.38
S110Z275BMG
E
11.25
15.93
S110Z276BMG
F
15.75
22.30
S110Z277BMG
G
22.05
31.23
S110Z278BMG
H
30.88
43.73
S110Z279BMG
J
43.23
61.21
S110Z280BMG
K
60.52
85.70
S110Z281BMG
L
84.73
119.9
S110Z282BMG
M
118.6
167.9
S110Z283BMG
N
166.0
235.2
S110Z284BMG
P
232.5
329.3
S110Z285BMG
Q
325.4
460.9
S110Z286BMG
R
455.7
645.3
S110Z287BMG
S
638.0
903.4
S110Z288BMG
T
893.2
1265.
S110Z289BMG
U
1250.
1771.
S110Z290BMG
V
1750.
2479.
S110Z291BMG
W
2451.
3471.
S110Z292BMG
X
3431.
4859.
S110Z319BMG
Y
4804.
6802.
S110Z321BMG
1
6724.
9523.
S110Z317BMG
2
9388.
13337.
S110Z228BMG
3
13176.
18667.
S110Z226BMG
4
18457.
30060.
S110Z224BMG
*Materials: BMG = 316 Stainless Steel Electropolished
CVA = Hastelloy C
TM
(ACLFE only)
DCA = Monel R
TM
(ACLFE only)
NOTES:
• For flow rates less than 8 sccm, use the low flow plug, P/N 618-K-019-BMG in place of a restrictor assembly.
• If two sizes are allowed because of overlap, select the larger size.
• Restrictor size not required to enter order.
