3-3
Brooks
®
Models 5964, 5850EM
Section 3 Operation
Installation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
Table 3-1 Cables, Calibration Covers and PC Boards for Model 5964/5850EM
5964/5850EM
To Model
Cable Type
Cable Part Number
5 feet
10 feet
25 feet
50 feet
0151E (Panel)
Ribbon
S124Z469AAA
S124Z470AAA
S124Z471AAA
S124Z472AAA
Card
Open Frame
Edge
0151E (Table Top)
0152E
Shielded
S124Z669AAA
S124Z539AAA
S124Z562AAA
S124Z670AAA
0154E
0151E (Panel)
Shielded
S124Z361AAA
S124Z362AAA
S124Z363AAA
S124Z435AAA
D-Connector
Open Frame
(Voltage I/O)
0151E (Table Top)
0152E
Shielded
S124Z576AAA
S124Z577AAA
S124Z578AAA
S124Z579AAA
0154E
0151
i
(Panel)
Shielded
S124Z361AAA
S124Z362AAA
S124Z363AAA
S124Z435AAA
D-Connector
0151
i
(Table Top)
(Current I/O)
0152
i
Shielded
S124Z576AAA
S124Z577AAA
S124Z578AAA
S124Z579AAA
0154
i
***QTA = Viton, SUA = Buna, TTA = Kalrez
Break Out Board Assembly:
Card Edge P/N S273Z649AAA
D-Connector P/N S273Z668AAA
Installs directly between mass flow controller and
interconnecting cable. Allows convenient access to all signals
for easy troubleshooting of the system.
Contains:
1 Break Out PC Board
1 5 foot Extension Cable
1 Terminal PC Board
Calibration Cover:
Card Edge P/N 909Z011EAD
D-Connector P/N 909Z017EAD
Calibration covers reduce the chance of accidental cantact with
the circuit board but allow access for all adjustment
potentiometers and test points needed for calibration.
