PFC Operation Manual
1. Introduction
Contents
Description and Applications ...................................................................................................... 3
PFC Versions............................................................................................................................... 6
PFC Performance Specifications................................................................................................. 7
Using this Manual ....................................................................................................................... 9
Overview ................................................................................................................................... 10
Safety Alerts Defined ................................................................................................................ 11
Safety Precautions for the PFC ................................................................................................. 13
Safety Guidelines ...................................................................................................................... 16
Equipment Guidelines ............................................................................................................... 17
Standard Symbols on the Equipment ........................................................................................ 19
Safety Labels on the PFC .......................................................................................................... 20
Safety and Operational Interlocks ............................................................................................. 36
General Hazards ........................................................................................................................ 37
Electrical Hazards ..................................................................................................................... 40
Lockout/Tagout (LOTO)........................................................................................................... 43
Gas Hazards............................................................................................................................... 45
Vacuum Hazards ....................................................................................................................... 46
Fire and Explosion Hazards ...................................................................................................... 47
Recycling................................................................................................................................... 48
Chemical Hazards ..................................................................................................................... 48
Emergency Conditions .............................................................................................................. 49
Emergency Contact Information ............................................................................................... 49
Material Safety Data Sheets ...................................................................................................... 50
Controls and Indicators ............................................................................................................. 51
Modes of Operation................................................................................................................... 54
Operating the PFC with a Cryocoil ........................................................................................... 56
Operating the PFC with a Cryobaffle........................................................................................ 59
825160-00, revision B
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