PFC Operation Manual
825160-00, revision B
Information provided within this document is subject to change without notice, and although
believed to be accurate, Brooks Automation assumes no responsibility for any errors, omissions,
or inaccuracies.
AcuLigner, AcuLine, AcuTran, AcuTrav, AeroLoader IV, AeroTrak, ARV 2000, AquaTran,
Atmospheric Express, BALI 400 Indexer, BiSymmetrik, ExpressLock, FabExpress, FixLoad,
FrogLeg, Gemini, Gemini Express, Gemini Express Tandem, Guardian Bare Reticle Stocker,
Hercules, Hercules Express, InCooler, InLigner, InLine Express, Leapfrog, Linear eXchange,
MagnaTran 7, MagnaTran 70, MagnaTran 8, MagnaTran X, Marathon, Marathon Express,
Marathon Express Tandem, MicroTool, MultiTran, OneFab AMHS, OpenMTS, PASIV, PF-100,
PowerPak, Reliance ATR, Reliance DFR, Reliance WCR, SENTRY, TCM, Time Optimal
Trajectory, TopCooler, TurboStocker, TurboStocker XT, Ultrasort, VacuTran, VCD, VCE, VPE,
WAVE, WAVE II, Zaris, and Z-Bot are trademarks of Brooks Automation Hardware.
All other trademarks are properties of their respective owners.
© Brooks Automation 2011, All Rights Reserved. The information included in this manual is
Brooks Proprietary Information and is provided for the use of Brooks customers only and cannot
be used for distribution, reproduction, or sale without the expressed written permission of Brooks
Automation. This information may be incorporated into the user’s documentation, however any
changes made by the user to this information is the responsibility of the user.
Brooks Automation
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Chelmsford, MA 01824
Phone +1 (978) 262-2400
Fax +1 (978) 262-2500
For emergencies, contact Technical Support 1-800-FOR-GUTS (800-367-4887)
This manual is available in the following formats: CD, Paper
This manual is available in the following languages: English.
This technology is subject to United States export Administration Regulations and authorized to
the destination only; diversion contrary to U.S. law is prohibited.
Printed in the U.S
