PFC Operation Manual
1. Introduction
825160-00, revision B
7
PFC Performance Specifications
Table 3 compares the performance specifications of four models of the PFC. This table is
intended to be representative of the PFC product family. For more information about specific
PFC models, contact Brooks Automation Polycold Systems.
Table 3. PFC Models Performance Specifications
Performance
1
1101-LT 552HC 672HC 1102HC
Maximum load
(watts at warmest temperature)
800
1,000 1,500 3,600
Theoretical maximum pumping
speed (l/sec)
2
74,5000 74,5000 104,300 298,000
Conservative pumping speed, in
chamber (l/sec)
2
50,000 50,000 70,000 200,000
Ultimate operating pressure, torr
(mbar)
3
2
X
10
‐
12
(3
X
10
‐
12
)
2 X 10
-9
(3 X 10
-9
)
5 X 10
-9
(7 X 10
-9
)
3 X 10
-8
(4 X 10
-8
)
Maximum pump start pressure,
(atm)
4
1
1 1 1
Time to defrost, minutes
5
4.0 4.0 4.0 7.0
Total cryocoil surface area m
2
(ft
2
) 0.5 (5.4)
0.5 (5.4)
0.7 (7.5)
2.0 (21.6)
Refrigerant Lines and Cryocoils
Standard line length, m (ft)
2.44
(8)
2.44 (8)
2.44 (8)
2.44 (8)
Single-circuit Tube O.D., mm (in) 12 (1/2)
12 (1/2)
16 (5/8)
16 (5/8)
Single-circuit Tube length, m (ft)
13.3 (41.1)
13.3 (41.1)
14 (46)
40 (132)
Dual-circuit Tube O.D., mm (in)
10 (3/8)
10 (3/8)
12 (1/2)
16 (5/8)
Dual-circuit Tube length per coil,
m (ft)
7.96 (27.4)
7.96 (27.4)
9.28 (29)
20 (66)
Continued on next page
Footnotes:
1
Standard conditions for performance testing:
Cryocoil environment at 20°C
Recommend cryocoils and line lengths
Cooling water temperature between 25° and 28°C
Operation at 60 Hz
2
Larger cryocoils may give greater pumping speeds, and can be used in some applications. Contact your
sales representative or the factory for application details.
3
Standard cryocoil at 25% of maximum pumping speed
4
Recommended cryopump start pressure is near normal “crossover.” Mechanical roughing pumps and
blowers are generally more effective for moisture above 1 torr.
5
Estimated time depending upon cryocoil mass.
