2. Safety
PFC Operation Manual
48
825160-00, revision B
Recycling
The PFC contains the following items that may require special handling for disposal.
Chemical Hazards
normal use, the PFC doe
operators or technicians to any hazardous chemicals.
ay be reco
at isopropyl alcohol be used for surface cleaning of the
FC during routine mainten
edures.
ANGER
the vacuum
hamber could have very ha
tamination as a result of exposure to process gases.
ation certif
be obtained prior to performing a repair on or near these
urfaces. Personal protec
ent such as gloves, eye wear, respirators, self-contained
WARNING
All power to the PFC must be disconnected per the facility’s lockout/ tagout procedure before
using any cleaning solutions to prevent the risk of electrical shock.
When a chemical is used while servicing the PFC, the standard precautions for use of that
chemical must be observed. These safeguards include sufficient ventilation, proper disposal of
excess chemical and wipes and any other precautions specified for use of hazardous chemicals
within the facility where the PFC is being used.
WARNING
Whenever any cleaning fluid is used during service of the PFC, the facility’s environmental
procedures must be followed regarding the storage, handling, and disposal of that fluid along
with any affected apparatus.
In
s not expose
mmended th
ance proc
However, it m
P
D
Some cleaning compounds may leave a flammable or toxic residue. Surfaces inside
c
zardous con
ication should
tive equipm
Decontamin
s
breathing apparatus, etc. may also be required.
