BOC Edwards B735-01-000, Instruction Manual

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Section Title Page
4.6 Bakeout 24
5 MAINTENANCE 26
5.1 Introduction 26
5.2 Bearing life 26
5.3 Rotor life 26
5.4 Clean the pump 27
5.5 Fault finding 28
6 STORAGE AND DISPOSAL 32
6.1 Storage 32
6.2 Disposal 32
7 SERVICE, SPARES AND ACCESSORIES 33
7.1 Introduction 33
7.2 Service 33
7.3 Spares 33
7.3.1 ISX inlet-screen 33
7.3.2 WCX water-cooler 33
7.3.3 Inlet-flange seals 34
7.3.4 EXC300M Controller 34
7.3.5 Pump-to-controller cable 34
7.4 Accessories 34
7.4.1 Installation 34
7.4.2 BX bakeout band 34
7.4.3 FL20K foreline trap 35
7.4.4 TAV vent-valve and vent-port adaptor 35
7.4.5 ACX air-cooler 35
7.4.6 Vibration isolators 35
7.4.7 PRX purge-restrictor 35
7.4.8 VRX vent-restrictor 36
RETURN OF BOC EDWARDS EQUIPMENT
Illustrations
Figure Title Page
1 Part-sectional view of EXT250M Turbomolecular Pump 3
2 Maximum allowed rate of pressure rise during venting:
backing pressure plotted against time
8
3 EXT250M Turbomolecular Pump dimensions (mm) 10
4 Typical pumping system 12
5 Correct installation of the inlet-screen 13
6 Installation of EXT250M optional accessories (and spares) 37
ii EXT250M Turbomolecular Pump